Inventor · disambiguated record
Sudha Rathi
Also filed as: RATHI SUDHA · RATHI SUDHA S · RATHI SUDHA S R
33 granted patents·25 pending applications·523 citations·filing 1998–2025
97Inventor score
Top patents by PatentIndex Score
58 records- 0196US8361906B2Ultra high selectivity ashable hard mask filmAPPLIED MATERIALS INC·Filed 2010·Granted Jan 29, 2013·63 cites·13 claims
- 0295US8536065B2Ultra high selectivity doped amorphous carbon strippable hardmask development and integrationSEAMONS MARTIN JAY·Filed 2011·Granted Sep 17, 2013·51 cites·17 claims
- 0394US8993454B2Ultra high selectivity doped amorphous carbon strippable hardmask development and integrationAPPLIED MATERIALS INC·Filed 2013·Granted Mar 31, 2015·16 cites·5 claims
- 0493US7407893B2Liquid precursors for the CVD deposition of amorphous carbon filmsAPPLIED MATERIALS INC·Filed 2005·Granted Aug 5, 2008·33 cites·20 claims
- 0593US6355571B1Method and apparatus for reducing copper oxidation and contamination in a semiconductor deviceAPPLIED MATERIALS INC·Filed 1999·Granted Mar 12, 2002·98 cites·14 claims
- 0689US7867578B2Method for depositing an amorphous carbon film with improved density and step coverageAPPLIED MATERIALS INC·Filed 2006·Granted Jan 11, 2011·12 cites·14 claims
- 0789US6734102B2Plasma treatment for copper oxide reductionAPPLIED MATERIALS INC·Filed 2002·Granted May 11, 2004·39 cites·18 claims
- 0888US6946401B2Plasma treatment for copper oxide reductionAPPLIED MATERIALS INC·Filed 2003·Granted Sep 20, 2005·28 cites·13 claims
- 0986US9390910B2Gas flow profile modulated control of overlay in plasma CVD filmsAPPLIED MATERIALS INC·Filed 2014·Granted Jul 12, 2016·5 cites·20 claims
- 1086US9299581B2Methods of dry stripping boron-carbon filmsLEE KWANGDUK DOUGLAS·Filed 2012·Granted Mar 29, 2016·8 cites·8 claims
- 1186US6927178B2Nitrogen-free dielectric anti-reflective coating and hardmaskAPPLIED MATERIALS INC·Filed 2003·Granted Aug 9, 2005·32 cites·20 claims
- 1286US6853043B2Nitrogen-free antireflective coating for use with photolithographic patterningAPPLIED MATERIALS INC·Filed 2002·Granted Feb 8, 2005·41 cites·32 claims
- 1384US8282734B2Methods to improve the in-film defectivity of PECVD amorphous carbon filmsPADHI DEENESH·Filed 2008·Granted Oct 9, 2012·6 cites·8 claims
- 1482US10373822B2Gas flow profile modulated control of overlay in plasma CVD filmsAPPLIED MATERIALS INC·Filed 2017·Granted Aug 6, 2019·2 cites·18 claims
- 1582US7638440B2Method of depositing an amorphous carbon film for etch hardmask applicationAPPLIED MATERIALS INC·Filed 2004·Granted Dec 29, 2009·27 cites·28 claims
- 1679US7514125B2Methods to improve the in-film defectivity of PECVD amorphous carbon filmsAPPLIED MATERIALS INC·Filed 2007·Granted Apr 7, 2009·2 cites·7 claims
- 1777US7776516B2Graded ARC for high NA and immersion lithographyAPPLIED MATERIALS INC·Filed 2006·Granted Aug 17, 2010·4 cites·14 claims
- 1871US9837265B2Gas flow profile modulated control of overlay in plasma CVD filmsAPPLIED MATERIALS INC·Filed 2016·Granted Dec 5, 2017·1 cites·7 claims
- 1970US6700202B2Semiconductor device having reduced oxidation interfaceAPPLIED MATERIALS INC·Filed 2001·Granted Mar 2, 2004·8 cites·5 claims
- 2070US2025180992A1Deposition of resist underlayer for enhancing photoresist performanceAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2168US8183150B2Semiconductor device having silicon carbide and conductive pathway interfaceHUANG JUDY H·Filed 2008·Granted May 22, 2012·2 cites·16 claims
- 2268US8105465B2Method for depositing conformal amorphous carbon film by plasma-enhanced chemical vapor deposition (PECVD)LEE KWANGDUK DOUGLAS·Filed 2009·Granted Jan 31, 2012·3 cites·17 claims
- 2368US7105460B2Nitrogen-free dielectric anti-reflective coating and hardmaskAPPLIED MATERIALS INC·Filed 2002·Granted Sep 12, 2006·8 cites·37 claims
- 2467US8513129B2Planarizing etch hardmask to increase pattern density and aspect ratioSEAMONS MARTIN JAY·Filed 2010·Granted Aug 20, 2013·2 cites·13 claims
- 2566US9337072B2Apparatus and method for substrate clamping in a plasma chamberBALASUBRAMANIAN GANESH·Filed 2010·Granted May 10, 2016·2 cites·12 claims
- 2665US2025130500A1Methods for forming euv resist underlayerAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2765US2025258434A1Deposition of resist underlayer with reduced sp2 carbon contentAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 2861US9653327B2Methods of removing a material layer from a substrate using water vapor treatmentLEE KWANGDUK DOUGLAS·Filed 2011·Granted May 16, 2017·1 cites·11 claims
- 2961US2012204795A1Methods to improve the in-film defectivity of pecvd amorphous carbon filmsPADHI DEENESH·Filed 2012·Application pending·0 cites
- 3060US6541369B2Method and apparatus for reducing fixed charges in a semiconductor deviceAPPLIED MATERIALS INC·Filed 1999·Granted Apr 1, 2003·24 cites·30 claims
- 3160US2025336674A1In situ deposition of filmstacks for euv patterningAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 3257US8211626B2Maintenance of photoresist activity on the surface of dielectric arcs for 90 nm feature sizesAHN SANG H·Filed 2006·Granted Jul 3, 2012·1 cites·10 claims
- 3355US10510518B2Methods of dry stripping boron-carbon filmsAPPLIED MATERIALS INC·Filed 2015·Granted Dec 17, 2019·0 cites·19 claims
- 3454US11894228B2Treatments for controlling deposition defectsAPPLIED MATERIALS INC·Filed 2021·Granted Feb 6, 2024·0 cites·20 claims
- 3554US2025258433A1Underlayer treatment for improved photoresist adhesionAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 3652US2005263900A1Semiconductor device having silicon carbide and conductive pathway interfaceAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 3752US2008084650A1Apparatus and method for substrate clamping in a plasma chamberAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 3851US2014216498A1Methods of dry stripping boron-carbon filmsLEE KWANGDUK DOUGLAS·Filed 2013·Application pending·0 cites
- 3950US7094442B2Methods for the reduction and elimination of particulate contamination with CVD of amorphous carbonAPPLIED MATERIALS INC·Filed 2004·Granted Aug 22, 2006·4 cites·18 claims
- 4050US2016133443A1Methods of dry stripping boron-carbon filmsAPPLIED MATERIALS INC·Filed 2016·Application pending·0 cites
- 4149US2022293416A1Systems and methods for improved carbon adhesionAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 4248US2013284090A1Compensating concentration uncertainityBALASUBRAMANIAN GANESH·Filed 2013·Application pending·0 cites
- 4347US8088563B2Reduction in photoresist footing undercut during development of feature sizes of 120NM or lessAHN SANG H·Filed 2006·Granted Jan 3, 2012·0 cites·27 claims
- 4446US2012208373A1Method for depositing an amorphous carbon film with improved density and step coveragePADHI DEENESH·Filed 2012·Application pending·0 cites
- 4546US2011151142A1Pecvd multi-step processing with continuous plasmaAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 4645US10971390B2Methods of minimizing wafer backside damage in semiconductor wafer processingAPPLIED MATERIALS INC·Filed 2019·Granted Apr 6, 2021·0 cites·20 claims
- 4744US8125034B2Graded ARC for high NA and immersion lithographyYEH WENDY H·Filed 2010·Granted Feb 28, 2012·0 cites·11 claims
- 4844US2020058539A1Coating material for processing chambersAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 4944US2006222771A1Methods for the reduction and elimination of particulate contamination with cvd of amorphous carbonSEAMONS MARTIN J·Filed 2006·Application pending·0 cites
- 5044US2011104400A1Method for depositing an amorphous carbon film with improved density and step coveragePADHI DEENESH·Filed 2011·Application pending·0 cites
Showing the top 50 of 58 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →