Assignee
SEAMONS MARTIN JAY
US·2 granted patents·2 pending applications·53 citations·filing 2006–2011
Top patents by PatentIndex Score
4 records- 0195US8536065B2Ultra high selectivity doped amorphous carbon strippable hardmask development and integrationSEAMONS MARTIN JAY·Filed 2011·Granted Sep 17, 2013·51 cites·17 claims
- 0267US8513129B2Planarizing etch hardmask to increase pattern density and aspect ratioSEAMONS MARTIN JAY·Filed 2010·Granted Aug 20, 2013·2 cites·13 claims
- 0343US2009093128A1Methods for high temperature deposition of an amorphous carbon layerSEAMONS MARTIN JAY·Filed 2007·Application pending·0 cites
- 0443US2007286965A1Methods for the reduction and elimination of particulate contamination with cvd of amorphous carbonSEAMONS MARTIN JAY·Filed 2006·Application pending·0 cites
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