Inventor · disambiguated record
Kazuyuki Kasumi
Also filed as: KASUMI KAZUYUKI
41 granted patents·5 pending applications·585 citations·filing 1991–2021
98Inventor score
Top patents by PatentIndex Score
46 records- 0197US10990005B2Method in which alignment control of a member and a substrate is effected with respect to an in-plane direction of the substrate and an uncured material in a state of bringing a member and the uncured material on a substrate into contactCANON KK·Filed 2020·Granted Apr 27, 2021·3 cites·42 claims
- 0294US7180575B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2005·Granted Feb 20, 2007·20 cites·9 claims
- 0393US9579843B2Imprint apparatus in which alignment control of a mold and a substrate is effectedCANON KK·Filed 2013·Granted Feb 28, 2017·6 cites·12 claims
- 0492US5191218AVacuum chuckCANON KK·Filed 1991·Granted Mar 2, 1993·146 cites·16 claims
- 0591US7815424B2Imprinting machine and device manufacturing methodCANON KK·Filed 2005·Granted Oct 19, 2010·20 cites·5 claims
- 0691US7381272B2Processing apparatusCANON KK·Filed 2005·Granted Jun 3, 2008·14 cites·10 claims
- 0790US8834144B2Imprinting machine and device manufacturing methodNAKAMURA TAKASHI·Filed 2010·Granted Sep 16, 2014·9 cites·13 claims
- 0887US10670961B2Imprinting apparatus for producing a member in which a mold contacts a pattern forming layer using alignment control in an in-plane direction of a substrateCANON KK·Filed 2017·Granted Jun 2, 2020·2 cites·23 claims
- 0986US7807065B2Processing methodCANON KK·Filed 2006·Granted Oct 5, 2010·8 cites·2 claims
- 1086US7789647B2Processing apparatus and methodCANON KK·Filed 2005·Granted Sep 7, 2010·9 cites·8 claims
- 1186US5854819AMask supporting device and correction method therefor, and exposure apparatus and device producing method utilizing the sameCANON KK·Filed 1997·Granted Dec 29, 1998·60 cites·14 claims
- 1284US9573319B2Imprinting method and process for producing a member in which a mold contacts a pattern forming layerOKUSHIMA SHINGO·Filed 2008·Granted Feb 21, 2017·8 cites·27 claims
- 1384US7815425B2Processing apparatusCANON KK·Filed 2005·Granted Oct 19, 2010·8 cites·2 claims
- 1483US6754303B2Exposure apparatus and exposing methodCANON KK·Filed 2002·Granted Jun 22, 2004·21 cites·15 claims
- 1582US7785091B2Processing apparatus and device manufacturing methodCANON KK·Filed 2007·Granted Aug 31, 2010·6 cites·10 claims
- 1681US8973495B2Imprint apparatus, imprint method, and article manufacturing methodKASUMI KAZUYUKI·Filed 2009·Granted Mar 10, 2015·8 cites·10 claims
- 1780US5448612AX-ray exposure apparatusCANON KK·Filed 1994·Granted Sep 5, 1995·34 cites·32 claims
- 1879US7690912B2Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the sameCANON KK·Filed 2006·Granted Apr 6, 2010·5 cites·15 claims
- 1978US7846346B1Processing apparatus and methodCANON KK·Filed 2006·Granted Dec 7, 2010·4 cites·11 claims
- 2078US7658601B2Pattern forming apparatusCANON KK·Filed 2004·Granted Feb 9, 2010·20 cites·4 claims
- 2178US7233383B2Exposure apparatus, device manufacturing method, pattern generator and maintenance method to check for pixel deteriorationCANON KK·Filed 2005·Granted Jun 19, 2007·5 cites·6 claims
- 2277US7196321B2Fine pattern forming apparatus and fine pattern inspecting apparatusCANON KK·Filed 2005·Granted Mar 27, 2007·6 cites·17 claims
- 2376US8414279B2Imprint apparatus and article manufacturing methodKAWAKAMI EIGO·Filed 2009·Granted Apr 9, 2013·5 cites·6 claims
- 2476US6714277B2Exposure apparatus, gas replacement method, semiconductor device manufacturing method, semiconductor manufacturing factory and exposure apparatus maintenance methodCANON KK·Filed 2001·Granted Mar 30, 2004·16 cites·52 claims
- 2574US8616874B2Pattern transferring apparatus and pattern transferring methodKASUMI KAZUYUKI·Filed 2006·Granted Dec 31, 2013·4 cites·6 claims
- 2673US7110504B2Radiation generating apparatus, radiation generating method, exposure apparatus, and exposure methodCANON KK·Filed 2005·Granted Sep 19, 2006·8 cites·5 claims
- 2773US5835560AExposure apparatusCANON KK·Filed 1997·Granted Nov 10, 1998·33 cites·12 claims
- 2873US5572563AMirror unit and an exposure apparatus using the unitCANON KK·Filed 1994·Granted Nov 5, 1996·24 cites·16 claims
- 2972US7027127B2Exposure apparatus, device manufacturing method, stage apparatus, and alignment methodCANON KK·Filed 2004·Granted Apr 11, 2006·9 cites·18 claims
- 3072US6463119B1Exposure method, exposure apparatus and semiconductor manufacturing apparatusCANON KK·Filed 2000·Granted Oct 8, 2002·15 cites·6 claims
- 3169US6987830B2Radiation generating apparatus, radiation generating method, exposure apparatus, and exposure methodCANON KK·Filed 2003·Granted Jan 17, 2006·10 cites·9 claims
- 3268US8951031B2Imprinting apparatus and article manufacturing methodKASUMI KAZUYUKI·Filed 2009·Granted Feb 10, 2015·1 cites·8 claims
- 3368US7411655B2Load-lock techniqueCANON KK·Filed 2007·Granted Aug 12, 2008·2 cites·10 claims
- 3468US7236231B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2005·Granted Jun 26, 2007·2 cites·16 claims
- 3568US6381005B1Mask holding device, exposure apparatus and device manufacturing methodCANON KK·Filed 1998·Granted Apr 30, 2002·26 cites·11 claims
- 3665US7218382B2Load-lock techniqueCANON KK·Filed 2004·Granted May 15, 2007·7 cites·18 claims
- 3762US11815253B2Light source device, cooling method, and manufacturing method for productCANON KK·Filed 2021·Granted Nov 14, 2023·0 cites·10 claims
- 3860US8564891B2Holding apparatus, optical apparatus, and telescopeKASUMI KAZUYUKI·Filed 2011·Granted Oct 22, 2013·1 cites·9 claims
- 3957US2014151936A1Pattern transferring apparatus and pattern transferring methodCANON KK·Filed 2013·Application pending·0 cites
- 4057US2015123301A1Imprinting apparatus and article manufacturing methodCANON KK·Filed 2015·Application pending·0 cites
- 4156US8393885B2Processing apparatusKASUMI KAZUYUKI·Filed 2008·Granted Mar 12, 2013·0 cites·6 claims
- 4253US8347915B2Load-lock techniqueCANON KK·Filed 2007·Granted Jan 8, 2013·0 cites·5 claims
- 4352US7248335B2Exposure apparatus, device manufacturing method, stage apparatus, and alignment methodCANON KK·Filed 2006·Granted Jul 24, 2007·0 cites·2 claims
- 4450US2010059904A1Imprint apparatusCANON KK·Filed 2009·Application pending·0 cites
- 4544US2005118002A1Load-lock techniqueCANON KK·Filed 2004·Application pending·0 cites
- 4640US2005248659A1Exposure apparatus, and method, device manufacturing method, pattern generator and maintenance methodKASUMI KAZUYUKI·Filed 2005·Application pending·0 cites
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