Imprinting apparatus and article manufacturing method

Abstract

The imprint apparatus presses resin disposed on a substrate and a mold to each other to form a resin pattern on the substrate. The apparatus includes a driving device configured to move the mold and the substrate relatively to apply a pressing force between the mold and the resin, a measuring device configured to measure a position of at least one of the mold and the substrate, a detector configured to detect the pressing force, and a controller configured to control the driving device. The controller is configured to control the driving device using the position as a controlled variable in a first period, and to control the driving device using the pressing force as a controlled variable in a second period after the first period.

What is claimed is: 
     
         1 . An imprint apparatus for causing a mold to contact a material disposed on a substrate so as to form a pattern on the substrate, the apparatus comprising:
 a driving device configured to move the mold and the substrate relatively so as to apply a pressing force between the mold and the material;   a detector configured to detect the pressing force; and   a controller configured to control the driving device based on the detected pressing force during a time period continuing through contact between the mold and the material, and to limit an output therefrom to the driving device so as not to exceed a predetermined limit during a period before the contact, in the time period, in which the pressing force to be detected by the detector is zero.   
     
     
         2 . The imprint apparatus according to  claim 1 , wherein the detector includes a pressure sensor configured to sense a gas pressure or a load cell. 
     
     
         3 . The imprint apparatus according to  claim 1 , wherein the driving device includes a container, the controller controlling a gas pressure in the container so as to control the pressing force. 
     
     
         4 . The imprint apparatus according to  claim 3 , wherein the container is configured to be expanded and contracted by the gas pressure. 
     
     
         5 . The imprint apparatus according to  claim 3 , wherein the detector includes a pressure sensor configured to sense the gas pressure. 
     
     
         6 . The imprint apparatus according to  claim 1 , wherein the controller is configured to control the driving device based on the detected pressing force by feedback control. 
     
     
         7 . A method of manufacturing an article, the method comprising:
 forming a pattern on a substrate using an imprint apparatus; and   processing the substrate, on which the pattern has been formed, to manufacture the article,   wherein the imprint apparatus causes a mold to contact a material disposed on the substrate so as to form the pattern on the substrate, and includes:
 a driving device configured to move the mold and the substrate relatively so as to apply a pressing force between the mold and the material; 
 a detector configured to detect the pressing force; and 
 a controller configured to control the driving device based on the detected pressing force during a time period continuing through contact between the mold and the material, and to limit an output therefrom to the driving device so as not to exceed a predetermined limit during a period before the contact, in the time period, in which the pressing force to be detected by the detector is zero.