Inventor · disambiguated record
Severin Waldis
Also filed as: WALDIS SEVERIN
12 granted patents·2 pending applications·32 citations·filing 2010–2015
87Inventor score
Top patents by PatentIndex Score
14 records- 0192US8587767B2Illumination optics for EUV microlithography and related system and apparatusFIOLKA DAMIAN·Filed 2010·Granted Nov 19, 2013·12 cites·22 claims
- 0284US8767176B2Microlithographic projection exposure apparatusBLEIDISTEL SASCHA·Filed 2011·Granted Jul 1, 2014·6 cites·30 claims
- 0382US9523922B2Illumination system of a microlithographic projection exposure apparatus having a temperature control deviceZEISS CARL SMT GMBH·Filed 2014·Granted Dec 20, 2016·3 cites·21 claims
- 0475US9274434B2Light modulator and illumination system of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2014·Granted Mar 1, 2016·2 cites·20 claims
- 0571US9116440B2Optical module for guiding a radiation beamZEISS CARL SMT GMBH·Filed 2014·Granted Aug 25, 2015·2 cites·40 claims
- 0669US8797507B2Illumination system of a microlithographic projection exposure apparatus having a temperature control deviceBACH FLORIAN·Filed 2011·Granted Aug 5, 2014·2 cites·14 claims
- 0765US9946161B2Optical system for a microlithographic projection exposure apparatus and microlithographic exposure methodZEISS CARL SMT GMBH·Filed 2012·Granted Apr 17, 2018·1 cites·27 claims
- 0862US9791691B2Mirror arrayZEISS CARL SMT GMBH·Filed 2013·Granted Oct 17, 2017·2 cites·23 claims
- 0961US9804501B2Optical componentZEISS CARL SMT GMBH·Filed 2014·Granted Oct 31, 2017·1 cites·20 claims
- 1059US8717531B2Mirror for guiding a radiation bundleWALDIS SEVERIN·Filed 2010·Granted May 6, 2014·1 cites·20 claims
- 1158US9535336B2Microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2014·Granted Jan 3, 2017·0 cites·22 claims
- 1243US10078271B2Optical componentZEISS CARL SMT GMBH·Filed 2014·Granted Sep 18, 2018·0 cites·16 claims
- 1342US2012044474A1Optical module for guiding a radiation beamHAUF MARKUS·Filed 2011·Application pending·0 cites
- 1433US2015185469A1Method for regulating the tilting of a mirror elementZEISS CARL SMT GMBH·Filed 2015·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Severin Waldis files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →