Assignee
BLEIDISTEL SASCHA
DE·6 granted patents·16 citations·filing 2009–2012
Top patents by PatentIndex Score
6 records- 0184US8767176B2Microlithographic projection exposure apparatusBLEIDISTEL SASCHA·Filed 2011·Granted Jul 1, 2014·6 cites·30 claims
- 0279US8760744B2Correction of optical elements by correction light irradiated in a flat mannerBLEIDISTEL SASCHA·Filed 2009·Granted Jun 24, 2014·3 cites·27 claims
- 0371US8269948B2Projection exposure apparatus and optical systemBLEIDISTEL SASCHA·Filed 2009·Granted Sep 18, 2012·5 cites·38 claims
- 0470US10146137B2Catadioptric projection objective including a reflective optical component and a measuring deviceBLEIDISTEL SASCHA·Filed 2012·Granted Dec 4, 2018·2 cites·20 claims
- 0553US9110388B2Projection exposure apparatus with multiple sets of piezoelectric elements moveable in different directions and related methodBLEIDISTEL SASCHA·Filed 2012·Granted Aug 18, 2015·0 cites·48 claims
- 0645US9366977B2Semiconductor microlithography projection exposure apparatusBLEIDISTEL SASCHA·Filed 2011·Granted Jun 14, 2016·0 cites·42 claims
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