Inventor · disambiguated record
Mikko Ritala
Also filed as: RITALA MIKKO · RÍTALA MIKKO
81 granted patents·22 pending applications·2,454 citations·filing 1998–2025
99Inventor score
Top patents by PatentIndex Score
103 records- 0198US10731249B2Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatusASM IP HOLDING BV·Filed 2018·Granted Aug 4, 2020·286 cites·24 claims
- 0298US6416577B1Method for coating inner surfaces of equipmentASM MICROCHEMISTRY LTD·Filed 1998·Granted Jul 9, 2002·369 cites·28 claims
- 0397US11694903B2Area selective organic material removalASM IP HOLDING BV·Filed 2021·Granted Jul 4, 2023·4 cites·23 claims
- 0497US11390946B2Methods of forming a transition metal containing film on a substrate by a cyclical deposition processASM IP HOLDING BV·Filed 2020·Granted Jul 19, 2022·4 cites·20 claims
- 0597US11244825B2Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition processASM IP HOLDING BV·Filed 2020·Granted Feb 8, 2022·5 cites·20 claims
- 0697US10358407B2Synthesis and use of precursors for vapor deposition of tungsten containing thin filmsASM IP HOLDING BV·Filed 2017·Granted Jul 23, 2019·13 cites·10 claims
- 0797US10319588B2Method for depositing a metal chalcogenide on a substrate by cyclical depositionASM IP HOLDING BV·Filed 2017·Granted Jun 11, 2019·414 cites·24 claims
- 0897US6632279B1Method for growing thin oxide filmsASM MICROCHEMISTRY OY·Filed 2000·Granted Oct 14, 2003·314 cites·7 claims
- 0996US12209305B2Deposition of transition metal—comprising materialASM IP HOLDING BV·Filed 2022·Granted Jan 28, 2025·2 cites·20 claims
- 1096US11814400B2Synthesis and use of precursors for ALD of tellurium and selenium thin filmsASM INT NV·Filed 2021·Granted Nov 14, 2023·2 cites·19 claims
- 1196US11014866B2Synthesis and use of precursors for vapor deposition of tungsten containing thin filmsASM IP HOLDING BV·Filed 2019·Granted May 25, 2021·8 cites·20 claims
- 1296US6858546B2Method of depositing rare earth oxide thin filmsASM INTERNATIONAL NV·Filed 2002·Granted Feb 22, 2005·120 cites·22 claims
- 1395US11667595B2Synthesis and use of precursors for vapor deposition of tungsten containing thin filmsASM IP HOLDING BV·Filed 2021·Granted Jun 6, 2023·2 cites·7 claims
- 1495US6824816B2Process for producing metal thin films by ALDASM INT·Filed 2002·Granted Nov 30, 2004·136 cites·36 claims
- 1594US12065739B2Vapor deposition processesASM IP HOLDING BV·Filed 2022·Granted Aug 20, 2024·2 cites·20 claims
- 1694US11499222B2Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing materialASM IP HOLDING BV·Filed 2019·Granted Nov 15, 2022·4 cites·19 claims
- 1794US11047042B2Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin filmsASM IP HOLDING BV·Filed 2016·Granted Jun 29, 2021·12 cites·18 claims
- 1894US10619242B2Atomic layer deposition of rhenium containing thin filmsASM IP HOLDING BV·Filed 2017·Granted Apr 14, 2020·4 cites·21 claims
- 1994US9315896B2Synthesis and use of precursors for ALD of group VA element containing thin filmsPORE VILJAMI·Filed 2010·Granted Apr 19, 2016·16 cites·26 claims
- 2094US9223203B2Microcontact printed films as an activation layer for selective atomic layer depositionFÄRM ELINA·Filed 2011·Granted Dec 29, 2015·339 cites·17 claims
- 2193US11492703B2Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing materialASM IP HOLDING BV·Filed 2019·Granted Nov 8, 2022·4 cites·18 claims
- 2293US10208379B2Synthesis and use of precursors for ALD of group VA element containing thin filmsASM IP HOLDING BV·Filed 2017·Granted Feb 19, 2019·5 cites·13 claims
- 2393US10145009B2Vapor deposition of thin films comprising goldASM IP HOLDING BV·Filed 2017·Granted Dec 4, 2018·4 cites·25 claims
- 2493US9677173B2Precursors and methods for atomic layer deposition of transition metal oxidesASM INT NV·Filed 2016·Granted Jun 13, 2017·3 cites·23 claims
- 2593US7498272B2Method of depositing rare earth oxide thin filmsASM INT·Filed 2004·Granted Mar 3, 2009·47 cites·24 claims
- 2693US6706115B2Method for preparing metal nitride thin filmsASM INT·Filed 2002·Granted Mar 16, 2004·134 cites·27 claims
- 2792US11527403B2Methods for filling a gap feature on a substrate surface and related semiconductor structuresASM IP HOLDING BV·Filed 2020·Granted Dec 13, 2022·3 cites·21 claims
- 2891US10308673B2Synthesis and use of precursors for ALD of tellurium and selenium thin filmsASM INT NV·Filed 2017·Granted Jun 4, 2019·4 cites·20 claims
- 2991US9382615B2Vapor deposition of LiF thin filmsASM IP HOLDING BV·Filed 2013·Granted Jul 5, 2016·6 cites·16 claims
- 3090US9783563B2Synthesis and use of precursors for ALD of tellurium and selenium thin filmsASM INT NV·Filed 2015·Granted Oct 10, 2017·4 cites·20 claims
- 3190US7220451B2Process for producing metal thin films by ALDASM INT·Filed 2004·Granted May 22, 2007·48 cites·16 claims
- 3288US2025389020A1Method and system for depositing noble metal-containing layerASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 3387US12442076B2Method and system for depositing noble metal-containing layerASM IP HOLDING BV·Filed 2024·Granted Oct 14, 2025·0 cites·26 claims
- 3487US10344378B2Precursors and methods for atomic layer deposition of transition metal oxidesASM INT NV·Filed 2017·Granted Jul 9, 2019·1 cites·20 claims
- 3587US9175390B2Synthesis and use of precursors for ALD of tellurium and selenium thin filmsPORE VILJAMI·Filed 2009·Granted Nov 3, 2015·8 cites·42 claims
- 3686US11643728B2Atomic layer deposition and etching of transition metal dichalcogenide thin filmsASM IP HOLDING BV·Filed 2021·Granted May 9, 2023·1 cites·7 claims
- 3786US11624112B2Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin filmsASM IP HOLDING BV·Filed 2021·Granted Apr 11, 2023·1 cites·20 claims
- 3886US11072622B2Synthesis and use of precursors for ALD of tellurium and selenium thin filmsASM INT NV·Filed 2019·Granted Jul 27, 2021·2 cites·10 claims
- 3986US11047046B2Vapor deposition of thin films comprising goldASM IP HOLDING BV·Filed 2018·Granted Jun 29, 2021·1 cites·20 claims
- 4086US7108747B1Method for growing oxide thin films containing barium and strontiumASM INT·Filed 1999·Granted Sep 19, 2006·79 cites·39 claims
- 4186US2025305117A1Synthesis and use of precursors for ald of molybdenum or tungsten containing thin filmsASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 4285US10941487B2Synthesis and use of precursors for ALD of group VA element containing thin filmsASM IP HOLDING BV·Filed 2020·Granted Mar 9, 2021·1 cites·24 claims
- 4385US9828674B2Synthesis and use of precursors for ALD of group VA element containing thin filmsASM IP HOLDING BV·Filed 2016·Granted Nov 28, 2017·2 cites·21 claims
- 4485US2025122612A1Deposition of transition metal-comprising materialASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 4583US2023093384A1Synthesis and use of precursors for ald of group va element containing thin filmsASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 4683US2024417852A1Vapor deposition processesASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 4782US12365981B2Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin filmsASM IP HOLDING BV·Filed 2023·Granted Jul 22, 2025·0 cites·6 claims
- 4882US11952658B2Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing materialASM IP HOLDING BV·Filed 2022·Granted Apr 9, 2024·0 cites·20 claims
- 4982US2023175132A1Vapor deposition of thin films comprising goldASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 5081US11959171B2Methods of forming a transition metal containing film on a substrate by a cyclical deposition processASM IP HOLDING BV·Filed 2022·Granted Apr 16, 2024·0 cites·20 claims
Showing the top 50 of 103 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Mikko Ritala files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →