Assignee
PORE VILJAMI
FI·3 granted patents·27 citations·filing 2008–2010
Top patents by PatentIndex Score
3 records- 0194US9315896B2Synthesis and use of precursors for ALD of group VA element containing thin filmsPORE VILJAMI·Filed 2010·Granted Apr 19, 2016·16 cites·26 claims
- 0287US9175390B2Synthesis and use of precursors for ALD of tellurium and selenium thin filmsPORE VILJAMI·Filed 2009·Granted Nov 3, 2015·8 cites·42 claims
- 0371US8945675B2Methods for forming conductive titanium oxide thin filmsPORE VILJAMI·Filed 2008·Granted Feb 3, 2015·3 cites·27 claims
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