Inventor · disambiguated record
Hatsuyuki Arai
Also filed as: ARAI HATSUYUKI
14 granted patents·1 pending application·723 citations·filing 1986–2000
95Inventor score
Files withSPEEDFAM CO LTD10ARAI HATSUYUKI1SPEEDFAM COMPANY LIMITED1SPEEDFAM CORP1SPEEDFAM IPEC CORP1
Top patents by PatentIndex Score
15 records- 0194US5099614AFlat lapping machine with sizing mechanismSPEEDFAM CO LTD·Filed 1987·Granted Mar 31, 1992·97 cites·5 claims
- 0287US4805348AFlat lapping machineSPEEDFAM CO LTD·Filed 1986·Granted Feb 21, 1989·50 cites·16 claims
- 0384US6012964ACarrier and CMP apparatusSPEEDFAM CO LTD·Filed 1998·Granted Jan 11, 2000·73 cites·56 claims
- 0484US5605499AFlattening method and flattening apparatus of a semiconductor deviceSPEEDFAM COMPANY LIMITED·Filed 1995·Granted Feb 25, 1997·71 cites·21 claims
- 0583US5916009AApparatus for applying an urging force to a waferSPEEDFAM CO LTD·Filed 1997·Granted Jun 29, 1999·70 cites·17 claims
- 0681US6089966ASurface polishing padFiled 1998·Granted Jul 18, 2000·68 cites·5 claims
- 0780US6110026ACarrier and polishing apparatusSPEEDFAM CO LTD·Filed 1999·Granted Aug 29, 2000·58 cites·10 claims
- 0877US6074277APolishing apparatusSPEEDFAM CO LTD·Filed 1999·Granted Jun 13, 2000·49 cites·5 claims
- 0975US5685766APolishing control methodSPEEDFAM CORP·Filed 1995·Granted Nov 11, 1997·55 cites·14 claims
- 1074US6040244APolishing pad control method and apparatusSPEEDFAM CO LTD·Filed 1997·Granted Mar 21, 2000·48 cites·17 claims
- 1174US6030488AChemical and mechanical polishing apparatusSPEEDFAM CO LTD·Filed 1998·Granted Feb 29, 2000·38 cites·12 claims
- 1262US6066230APlanarization method, workpiece measuring method, and surface planarization apparatus having a measuring deviceSPEEDFAM CO LTD·Filed 1998·Granted May 23, 2000·23 cites·5 claims
- 1353US6068545AWorkpiece surface processing apparatusSPEEDFAM CO LTD·Filed 1999·Granted May 30, 2000·18 cites·5 claims
- 1437US4707945AUpper plate driving system for surface lapping machineARAI HATSUYUKI·Filed 1986·Granted Nov 24, 1987·5 cites·5 claims
- 1534US2002077049A1Reinforced CMP carrier bladdersSPEEDFAM IPEC CORP·Filed 2000·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →