Assignee
SPEEDFAM COMPANY LIMITED
JP·3 granted patents·165 citations·filing 1995–1999
Top patents by PatentIndex Score
3 records- 0184US5605499AFlattening method and flattening apparatus of a semiconductor deviceSPEEDFAM COMPANY LIMITED·Filed 1995·Granted Feb 25, 1997·71 cites·21 claims
- 0276US6048259AWafer loading and unloading mechanism for loading robotSPEEDFAM COMPANY LIMITED·Filed 1999·Granted Apr 11, 2000·66 cites·1 claims
- 0363US5645472APolishing deviceSPEEDFAM COMPANY LIMITED·Filed 1996·Granted Jul 8, 1997·28 cites·4 claims
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