Inventor · disambiguated record
Yasushi Yoda
Also filed as: YODA YASUSHI
12 granted patents·6 pending applications·87 citations·filing 2001–2021
88Inventor score
Top patents by PatentIndex Score
18 records- 0190US6583597B2Stage apparatus including non-containing gas bearings and microlithography apparatus comprising sameNIKON CORP·Filed 2001·Granted Jun 24, 2003·32 cites·62 claims
- 0286US6654100B2Stage device and exposure apparatus, and method of manufacturing a deviceNIKON CORP·Filed 2001·Granted Nov 25, 2003·32 cites·41 claims
- 0381US10044241B2Coil insulating structure/bobbin with grooves for inserting insulating slot closerNAKATAKE KOUJI·Filed 2014·Granted Aug 7, 2018·7 cites·4 claims
- 0468US9772564B2Exposure apparatus and exposure method, and device manufacturing methodNIKON CORP·Filed 2012·Granted Sep 26, 2017·1 cites·20 claims
- 0565US11979077B2Motor stator and method for manufacturing motor statorSANYO ELECTRIC CO·Filed 2021·Granted May 7, 2024·0 cites·5 claims
- 0655US8189168B2Exposure apparatus, device production method, cleaning apparatus, cleaning method, and exposure methodNAGASAKA HIROYUKI·Filed 2008·Granted May 29, 2012·0 cites·69 claims
- 0755US7763999B2Stator for rotary electric machinesSANYO ELECTRIC CO·Filed 2007·Granted Jul 27, 2010·2 cites·3 claims
- 0854US2017371249A1Exposure apparatus and exposure method, and device manufacturing methodNIPPON KOGAKU KK·Filed 2017·Application pending·0 cites
- 0953US10951082B2Stator of rotating armature and assembly method thereofSANYO ELECTRIC CO·Filed 2018·Granted Mar 16, 2021·0 cites·7 claims
- 1053US10170970B2Stepper motorSANYO ELECTRIC CO·Filed 2015·Granted Jan 1, 2019·0 cites·3 claims
- 1152US2012204913A1Exposure apparatus, device production method, cleaning apparatus, cleaning method, and exposure methodNAGASAKA HIROYUKI·Filed 2012·Application pending·0 cites
- 1250USD610987SElectric motorSANYO ELECTRIC CO·Filed 2009·Granted Mar 2, 2010·8 cites·1 claims
- 1346US2009103064A1Maintenance method, exposure method and apparatus and device manufacturing methodNIKON CORP·Filed 2008·Application pending·0 cites
- 1442USD610988SElectric motorSANYO ELECTRIC CO·Filed 2009·Granted Mar 2, 2010·5 cites·1 claims
- 1541US2008123067A1Movable Body System, Exposure Apparatus, And Device Manufacturing MethodNIKON CORP·Filed 2005·Application pending·0 cites
- 1638US2004075201A1Shock-absorber units for use in a vacuum chamber for braking runaway moving objectsNIKON CORP·Filed 2003·Application pending·0 cites
- 1735US2003178579A1Stage devices exhibiting reduced deformation, and microlithography systems comprising sameNIKON CORP·Filed 2003·Application pending·0 cites
- 1827US8063523B2Stator for rotary electric machineOOHASHI MASAAKI·Filed 2010·Granted Nov 22, 2011·0 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →