Exposure apparatus and exposure method, and device manufacturing method

Abstract

A movable body apparatus moves an object and includes a measurement member in a cantilevered supported state; a moving member having a holding section of the object and a space section into which the measurement member can be inserted; a measurement system that measures positional information of the moving member by irradiating a grating member with a measurement beam via a head and receiving light of the measurement beam from the grating member, the head being provided at one of the measurement member and the moving member, and the grating member being provided at the other of the measurement member and the moving member; and a drive system that moves the moving member based on the positional information. The measurement member has a cross-sectional shape in which its fixed end is thicker than its free end.

What is claimed is: 
     
         1 . A movable body apparatus that moves an object, the apparatus comprising:
 a measurement member in a cantilevered supported state;   a moving member having a holding section of the object and a space section inside of which the measurement member can be inserted;   a measurement system that measures positional information of the moving member by irradiating a grating member with a measurement beam via a head and receiving a light of the measurement beam from the grating member, the head being provided at one of the measurement member and the moving member, and the grating member being provided at the other of the measurement member and the moving member; and   a drive system that moves the moving member based on the positional information, wherein   the measurement member has a cross-sectional shape in which its fixed end is thicker, compared with its free end.   
     
     
         2 . The movable body apparatus according to  claim 1 , wherein
 the measurement member has the cross-sectional shape in which the fixed end is thicker, compared with its portion at which the head or the grating member is provided.   
     
     
         3 . The movable body apparatus according to  claim 1 , wherein
 a damping member is attached to the free end of the measurement member.   
     
     
         4 . An exposure apparatus that exposes an object with an energy beam, the apparatus comprising:
 the movable body apparatus according to  claim 1 ; and   an optical system that irradiates the object held by the moving member with the energy beam.   
     
     
         5 . The exposure apparatus according to  claim 4 , further comprising:
 the moving member serving as a first moving member;   a second moving member;   a third moving member;   an exposure station which has the optical system, and in which exposure of the object held by the first moving member or the second moving member is performed;   a measurement station which is disposed to be separated from the exposure station, and in which a predetermined measurement with respect to the object held by the first moving member or the second moving member is performed; and   a measurement device held by the third moving member, wherein   the drive system moves each of the first moving member and the second moving member from one of the exposure station and the measurement station to the other of the exposure station and the measurement station.   
     
     
         6 . A device manufacturing method, comprising:
 exposing an object using the exposure apparatus according to  claim 4 ; and
 developing the object that has been exposed.