Inventor · disambiguated record
Allan K. Ronne
Also filed as: RONNE ALLAN · RONNE ALLAN K · RONNE ALLAN KENT
12 granted patents·8 pending applications·189 citations·filing 2006–2023
89Inventor score
Top patents by PatentIndex Score
20 records- 0196US7854820B2Upper electrode backing member with particle reducing featuresLAM RES CORP·Filed 2006·Granted Dec 21, 2010·38 cites·7 claims
- 0293US8970114B2Temperature controlled window of a plasma processing chamber componentLAM RES CORP·Filed 2013·Granted Mar 3, 2015·118 cites·20 claims
- 0392US7685965B1Apparatus for shielding process chamber portLAM RES CORP·Filed 2006·Granted Mar 30, 2010·17 cites·10 claims
- 0486US8702866B2Showerhead electrode assembly with gas flow modification for extended electrode lifeAUGUSTINO JASON·Filed 2006·Granted Apr 22, 2014·10 cites·19 claims
- 0579US10037869B2Plasma processing devices having multi-port valve assembliesLAM RES CORP·Filed 2015·Granted Jul 31, 2018·2 cites·22 claims
- 0671US8709202B2Upper electrode backing member with particle reducing featuresDE LA LLERA ANTHONY·Filed 2010·Granted Apr 29, 2014·2 cites·11 claims
- 0766US8854451B2Automated bubble detection apparatus and methodCORMIER JOSH·Filed 2011·Granted Oct 7, 2014·2 cites·14 claims
- 0858US12100575B2Plasma processing devices having multi-port valve assembliesLAM RES CORP·Filed 2018·Granted Sep 24, 2024·0 cites·30 claims
- 0953US9093483B2Showerhead electrode assembly with gas flow modification for extended electrode lifeLAM RES CORP·Filed 2014·Granted Jul 28, 2015·0 cites·17 claims
- 1051US8945317B2System and method for cleaning gas injectorsLAM RES CORP·Filed 2012·Granted Feb 3, 2015·0 cites·12 claims
- 1150US2014113453A1Tungsten carbide coated metal component of a plasma reactor chamber and method of coatingLAM RES CORP·Filed 2012·Application pending·0 cites
- 1249US2023360894A1High-conductance vacuum valves for wafer processing systemsLAM RES CORP·Filed 2021·Application pending·0 cites
- 1348US2023114538A1Adapter plate to attach turbo pumps to process modulesLAM RES CORP·Filed 2021·Application pending·0 cites
- 1447US2017040147A1Systems Comprising Silicon Coated Gas Supply Conduits and Methods for Applying CoatingsLAM RES CORP·Filed 2016·Application pending·0 cites
- 1546US11282737B2Moving substrate transfer chamberLAM RES CORP·Filed 2019·Granted Mar 22, 2022·0 cites·16 claims
- 1646US2013105083A1Systems Comprising Silicon Coated Gas Supply Conduits And Methods For Applying CoatingsSHIH HONG·Filed 2011·Application pending·0 cites
- 1745US2025183011A1Liquid cooling plate for cooling of dielectric window of a substrate processing systemLAM RES CORP·Filed 2023·Application pending·0 cites
- 1844US2015047785A1Plasma Processing Devices Having Multi-Port Valve AssembliesLAM RES CORP·Filed 2013·Application pending·0 cites
- 1942US8597428B2Vacuum sealing radio frequency (RF) and low frequency conducting actuatorBROWN DANNY·Filed 2008·Granted Dec 3, 2013·0 cites·25 claims
- 2034US2017191685A1Self-sustained in-situ thermal control apparatusLAM RES CORP·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →