Assignee
AUGUSTINO JASON
US·5 granted patents·42 citations·filing 2006–2009
Top patents by PatentIndex Score
5 records- 0188US9412555B2Lower electrode assembly of plasma processing chamberAUGUSTINO JASON·Filed 2009·Granted Aug 9, 2016·17 cites·12 claims
- 0286US8702866B2Showerhead electrode assembly with gas flow modification for extended electrode lifeAUGUSTINO JASON·Filed 2006·Granted Apr 22, 2014·10 cites·19 claims
- 0383US8171877B2Backside mounted electrode carriers and assemblies incorporating the sameAUGUSTINO JASON·Filed 2008·Granted May 8, 2012·8 cites·20 claims
- 0472US8276604B2Peripherally engaging electrode carriers and assemblies incorporating the sameAUGUSTINO JASON·Filed 2008·Granted Oct 2, 2012·4 cites·16 claims
- 0569US8603292B2Quartz window for a degas chamberAUGUSTINO JASON·Filed 2009·Granted Dec 10, 2013·3 cites·9 claims
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