Self-sustained in-situ thermal control apparatus

Abstract

A thermal management system for a substrate processing tool located in a fabrication room includes a blower that draws air from the fabrication room and causes the air to flow through a process module of the substrate processing tool. Heat is transferred from the process module to the air and the air is exhausted from the process module. A heat exchanger receives the air exhausted from the process module, cools the air, and provides the cooled air to at least one of the fabrication room, a subfloor of the fabrication room, and the process module.

What is claimed is: 
     
         1 . A thermal management system for a substrate processing tool located in a fabrication room, the thermal management system comprising:
 a blower that draws air from the fabrication room and causes the air to flow through a process module of the substrate processing tool, wherein heat is transferred from the process module to the air and the air is exhausted from the process module; and   a heat exchanger that receives the air exhausted from the process module, cools the air, and provides the cooled air to at least one of the fabrication room, a subfloor of the fabrication room, and the process module.   
     
     
         2 . The thermal management system of  claim 1 , wherein at least one of the blower and the heat exchanger is located in the subfloor of the fabrication room. 
     
     
         3 . The thermal management system of  claim 1 , wherein the substrate processing tool includes a plurality of process modules including the process module, and wherein each of the plurality of process modules is in fluid communication with a different one of a plurality of blowers. 
     
     
         4 . The thermal management system of  claim 1 , wherein the substrate processing tool includes a plurality of process modules including the process module, and wherein each of the plurality of process modules is in fluid communication with a different one of a plurality of heat exchangers. 
     
     
         5 . The thermal management system of  claim 1 , wherein the substrate processing tool includes a plurality of process modules including the process module, and wherein each of the plurality of process modules is in fluid communication with (i) a different one of a plurality of blowers and (ii) the heat exchanger. 
     
     
         6 . The thermal management system of  claim 5 , further comprising a manifold that receives the air exhausted from each of the plurality of process modules and routes the air exhausted from each of the plurality of process modules to the heat exchanger. 
     
     
         7 . The thermal management system of  claim 1 , wherein the heat exchanger includes a first heat exchanger and a second heat exchanger connected in series. 
     
     
         8 . The thermal management system of  claim 1 , wherein the blower includes (i) a first blower connected between the process module and the heat exchanger in a flow path of the air exhausted from the process module and (ii) a second blower connected between the heat exchanger and the fabrication room in a flow path of the air cooled by the heat exchanger. 
     
     
         9 . The thermal management system of  claim 1 , further comprising a damper connected between the process module and the heat exchanger in a flow path of the air exhausted from the process module. 
     
     
         10 . The thermal management system of  claim 1 , further comprising a user interface module that monitors a parameter associated with the thermal management system and selectively controls at least one of the blower and the heat exchanger based on the monitored parameter. 
     
     
         11 . The thermal management system of  claim 10 , wherein the parameter includes at least one of a temperature and a flow rate associated with the thermal management system. 
     
     
         12 . A thermal management method for a substrate processing tool located in a fabrication room, method comprising:
 drawing air from the fabrication room and causing the air to flow through a process module of the substrate processing tool, wherein heat is transferred from the process module to the air;   exhausting the air from the process module;   receiving the air exhausted from the process module;   cooling the air; and   providing the cooled air to at least one of the fabrication room, a subfloor of the fabrication room, and the process module.   
     
     
         13 . The method of  claim 12 , further comprising providing at least one of a blower and a heat exchanger in the subfloor of the fabrication room. 
     
     
         14 . The method of  claim 12 , further comprising providing fluid communication between each of a plurality of the process modules and a respective one of a plurality of blowers. 
     
     
         15 . The method of  claim 12 , further comprising providing fluid communication between each of a plurality of the process modules and a respective one of a plurality of heat exchangers. 
     
     
         16 . The method of  claim 12 , further comprising providing fluid communication between each of a plurality of the process modules and (i) a respective one of a plurality of blowers and (ii) a heat exchanger. 
     
     
         17 . The method of  claim 16 , further comprising receiving the air exhausted from each of the plurality of the process modules at a manifold and routing the air exhausted from each of the plurality of the process modules from the manifold to the heat exchanger. 
     
     
         18 . The method of  claim 12 , further comprising monitoring a parameter associated with the cooled air and selectively controlling at least one of a blower and a heat exchanger based on the monitored parameter. 
     
     
         19 . The method of  claim 18 , wherein the parameter includes at least one of a temperature and a flow rate.