Inventor · disambiguated record
Danny Lu
Also filed as: LU DANNY · LU DANNY CHIEN
10 granted patents·3 pending applications·982 citations·filing 1995–2013
92Inventor score
Top patents by PatentIndex Score
13 records- 0197US6352611B1Ceramic composition for an apparatus and method for processing a substrateAPPLIED MATERIALS INC·Filed 2000·Granted Mar 5, 2002·97 cites·22 claims
- 0297US6123791ACeramic composition for an apparatus and method for processing a substrateAPPLIED MATERIALS INC·Filed 1998·Granted Sep 26, 2000·118 cites·52 claims
- 0396US5756400AMethod and apparatus for cleaning by-products from plasma chamber surfacesAPPLIED MATERIALS INC·Filed 1995·Granted May 26, 1998·407 cites·13 claims
- 0495US6352081B1Method of cleaning a semiconductor device processing chamber after a copper etch processAPPLIED MATERIALS INC·Filed 1999·Granted Mar 5, 2002·252 cites·15 claims
- 0592US7371467B2Process chamber component having electroplated yttrium containing coatingAPPLIED MATERIALS INC·Filed 2004·Granted May 13, 2008·37 cites·30 claims
- 0687US7833401B2Electroplating an yttrium-containing coating on a chamber componentAPPLIED MATERIALS INC·Filed 2007·Granted Nov 16, 2010·7 cites·20 claims
- 0787US6641697B2Substrate processing using a member comprising an oxide of a group IIIB metalAPPLIED MATERIALS INC·Filed 2001·Granted Nov 4, 2003·53 cites·19 claims
- 0866US8114525B2Process chamber component having electroplated yttrium containing coatingHAN NIANCI·Filed 2008·Granted Feb 14, 2012·1 cites·7 claims
- 0963US10217627B2Methods of non-destructive post tungsten etch residue removalAPPLIED MATERIALS INC·Filed 2013·Granted Feb 26, 2019·1 cites·18 claims
- 1054US2012138472A1Method of forming a process chamber component having electroplated yttrium containing coatingHAN NIANCI·Filed 2012·Application pending·0 cites
- 1153US6413389B1Method for recovering metal from etch by-productsAPPLIED MATERIALS INC·Filed 1999·Granted Jul 2, 2002·9 cites·16 claims
- 1246US2010190098A1Infrared endpoint detection for photoresist strip processesAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 1342US2003190870A1Cleaning ceramic surfacesAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →