Inventor · disambiguated record
Tomoaki Ukei
Also filed as: UKEI TOMOAKI
3 granted patents·1 pending application·58 citations·filing 2005–2010
69Inventor score
Top patents by PatentIndex Score
4 records- 0194US7846293B2Plasma processing apparatus and methodTOKYO ELECTRON LTD·Filed 2005·Granted Dec 7, 2010·42 cites·9 claims
- 0288US7713431B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2005·Granted May 11, 2010·16 cites·3 claims
- 0346US8262848B2Plasma processing apparatus and methodIWASAKI MASAHIDE·Filed 2010·Granted Sep 11, 2012·0 cites·12 claims
- 0438US2005279457A1Plasma processing apparatus and method, and plasma control unitTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →