Assignee
IWASAKI MASAHIDE
JP·4 granted patents·5 citations·filing 2010–2012
Top patents by PatentIndex Score
4 records- 0168US9691591B2Plasma processing apparatusIWASAKI MASAHIDE·Filed 2012·Granted Jun 27, 2017·2 cites·9 claims
- 0267US8967082B2Plasma processing apparatus and gas supply device for plasma processing apparatusIWASAKI MASAHIDE·Filed 2010·Granted Mar 3, 2015·2 cites·12 claims
- 0362US8182869B2Method for controlling temperature of a mounting tableIWASAKI MASAHIDE·Filed 2010·Granted May 22, 2012·1 cites·8 claims
- 0446US8262848B2Plasma processing apparatus and methodIWASAKI MASAHIDE·Filed 2010·Granted Sep 11, 2012·0 cites·12 claims
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