Inventor · disambiguated record
Mario Johannes Meissl
Also filed as: MEISSL MARIO J · MEISSL MARIO JOHANNES
53 granted patents·10 pending applications·1,770 citations·filing 2002–2025
98Inventor score
Files withMOLECULAR IMPRINTS INC27CANON KK26CANON NANOTECHNOLOGIES INC3GANAPATHISUBRAMANIAN MAHADEVAN2KHUSNATDINOV NIYAZ2
Top patents by PatentIndex Score
63 records- 0199US7077992B2Step and repeat imprint lithography processesMOLECULAR IMPRINTS INC·Filed 2002·Granted Jul 18, 2006·302 cites·71 claims
- 0298US7170589B2Apparatus to vary dimensions of a substrate during nano-scale manufacturingMOLECULAR IMPRINTS INC·Filed 2005·Granted Jan 30, 2007·45 cites·27 claims
- 0398US6900881B2Step and repeat imprint lithography systemsMOLECULAR IMPRINTS INC·Filed 2002·Granted May 31, 2005·310 cites·84 claims
- 0497US7338275B2Formation of discontinuous films during an imprint lithography processMOLECULAR IMPRINTS INC·Filed 2005·Granted Mar 4, 2008·117 cites·18 claims
- 0597US7019819B2Chucking system for modulating shapes of substratesMOLECULAR IMPRINTS INC·Filed 2002·Granted Mar 28, 2006·73 cites·24 claims
- 0697US6932934B2Formation of discontinuous films during an imprint lithography processMOLECULAR IMPRINTS INC·Filed 2002·Granted Aug 23, 2005·320 cites·55 claims
- 0796US7635445B2Method of separating a mold from a solidified layer disposed on a substrateMOLECULAR IMPRINTS INC·Filed 2005·Granted Dec 22, 2009·33 cites·15 claims
- 0896US7298456B2System for varying dimensions of a substrate during nanoscale manufacturingMOLECULAR IMPRINTS INC·Filed 2005·Granted Nov 20, 2007·45 cites·18 claims
- 0996US7224443B2Imprint lithography substrate processing tool for modulating shapes of substratesMOLECULAR IMPRINTS INC·Filed 2006·Granted May 29, 2007·26 cites·22 claims
- 1096US6951173B1Assembly and method for transferring imprint lithography templatesMOLECULAR IMPRINTS INC·Filed 2003·Granted Oct 4, 2005·74 cites·20 claims
- 1195US7420654B2Method of varying dimensions of a substrate during nano-scale manufacturingMOLECULAR IMPRINTS INC·Filed 2005·Granted Sep 2, 2008·34 cites·17 claims
- 1295US6980282B2Method for modulating shapes of substratesMOLECULAR IMPRINTS INC·Filed 2002·Granted Dec 27, 2005·73 cites·24 claims
- 1395US6805054B1Method, system and holder for transferring templates during imprint lithography processesMOLECULAR IMPRINTS INC·Filed 2003·Granted Oct 19, 2004·73 cites·20 claims
- 1494US7727453B2Step and repeat imprint lithography processesMOLECULAR IMPRINTS INC·Filed 2005·Granted Jun 1, 2010·22 cites·23 claims
- 1594US7641840B2Method for expelling gas positioned between a substrate and a moldMOLECULAR IMPRINTS INC·Filed 2007·Granted Jan 5, 2010·22 cites·20 claims
- 1694US6982783B2Chucking system for modulating shapes of substratesMOLECULAR IMPRINTS INC·Filed 2004·Granted Jan 3, 2006·37 cites·20 claims
- 1793US10534259B2Method and system for imprint force controlCANON KK·Filed 2017·Granted Jan 14, 2020·5 cites·22 claims
- 1892US8215946B2Imprint lithography system and methodGANAPATHISUBRAMANIAN MAHADEVAN·Filed 2009·Granted Jul 10, 2012·24 cites·16 claims
- 1991US10578984B2Adaptive chucking systemCANON KK·Filed 2016·Granted Mar 3, 2020·4 cites·11 claims
- 2091US8652393B2Strain and kinetics control during separation phase of imprint processKHUSNATDINOV NIYAZ·Filed 2009·Granted Feb 18, 2014·17 cites·6 claims
- 2191US8556616B2Template having a varying thickness to facilitate expelling a gas positioned between a substrate and the templateRESNICK DOUGLAS J·Filed 2011·Granted Oct 15, 2013·15 cites·6 claims
- 2289US11104057B2Imprint apparatus and method of imprinting a partial fieldCANON KK·Filed 2016·Granted Aug 31, 2021·3 cites·14 claims
- 2389US7150622B2Systems for magnification and distortion correction for imprint lithography processesMOLECULAR IMPRINTS INC·Filed 2003·Granted Dec 19, 2006·55 cites·22 claims
- 2488US12366800B2Method for improving accuracy of imprint force application in imprint lithographyCANON KK·Filed 2021·Granted Jul 22, 2025·1 cites·6 claims
- 2588US9529274B2Chucking system with recessed support featureCANON NANOTECHNOLOGIES INC·Filed 2014·Granted Dec 27, 2016·6 cites·26 claims
- 2687US11614693B2Method of determining the initial contact point for partial fields and method of shaping a surfaceCANON KK·Filed 2021·Granted Mar 28, 2023·1 cites·20 claims
- 2786USRE47483ETemplate having a varying thickness to facilitate expelling a gas positioned between a substrate and the templateMOLECULAR IMPRINTS INC·Filed 2015·Granted Jul 2, 2019·3 cites·20 claims
- 2886US8318066B2Step and repeat imprint lithography processSREENIVASAN SIDLGATA V·Filed 2011·Granted Nov 27, 2012·4 cites·13 claims
- 2985US8913230B2Chucking system with recessed support featureGANAPATHISUBRAMANIAN MAHADEVAN·Filed 2010·Granted Dec 16, 2014·4 cites·19 claims
- 3083US11994797B2System and method for shaping a film with a scaled calibration measurement parameterCANON KK·Filed 2020·Granted May 28, 2024·1 cites·17 claims
- 3183US10553501B2Apparatus for use in forming an adaptive layer and a method of using the sameCANON KK·Filed 2018·Granted Feb 4, 2020·3 cites·14 claims
- 3282US11590687B2Systems and methods for reducing pressure while shaping a filmCANON KK·Filed 2020·Granted Feb 28, 2023·1 cites·13 claims
- 3380US11347144B2Overlay improvement in nanoimprint lithographyCANON KK·Filed 2020·Granted May 31, 2022·1 cites·2 claims
- 3479US11161280B2Strain and kinetics control during separation phase of imprint processMOLECULAR IMPRINTS INC·Filed 2019·Granted Nov 2, 2021·1 cites·10 claims
- 3579US7943081B2Step and repeat imprint lithography processesMOLECULAR IMPRINTS INC·Filed 2010·Granted May 17, 2011·2 cites·19 claims
- 3679US2025349592A1Apparatus including a bonding head and a method of using the sameCANON KK·Filed 2025·Application pending·0 cites
- 3778US11776840B2Superstrate chuck, method of use, and method of manufacturing an articleCANON KK·Filed 2019·Granted Oct 3, 2023·2 cites·13 claims
- 3876US11604409B2Template replicationCANON KK·Filed 2022·Granted Mar 14, 2023·0 cites·8 claims
- 3975US9778578B2Low contact imprint lithography template chuck system for improved overlay correctionCANON NANOTECHNOLOGIES INC·Filed 2014·Granted Oct 3, 2017·2 cites·16 claims
- 4074US12463081B2Apparatus including a bonding head and a method of using the sameCANON KK·Filed 2023·Granted Nov 4, 2025·0 cites·14 claims
- 4172US11054739B2Imprint apparatus, control method, imprint method and manufacturing methodCANON KK·Filed 2018·Granted Jul 6, 2021·1 cites·20 claims
- 4271US8968620B2Safe separation for nano imprintingIM SE-HYUK·Filed 2011·Granted Mar 3, 2015·6 cites·27 claims
- 4371US7874831B2Template having a silicon nitride, silicon carbide or silicon oxynitride filmMOLECULAR IMPRINTS INC·Filed 2009·Granted Jan 25, 2011·2 cites·16 claims
- 4465US12498634B2System and method for generating control values for overlay control of an imprint toolCANON KK·Filed 2022·Granted Dec 16, 2025·0 cites·17 claims
- 4565US11480871B2Apparatus and method for improving accuracy of imprint force application in imprint lithographyCANON KK·Filed 2020·Granted Oct 25, 2022·0 cites·16 claims
- 4665US11020894B2Safe separation for nano imprintingMOLECULAR IMPRINTS INC·Filed 2018·Granted Jun 1, 2021·0 cites·10 claims
- 4760US2025167165A1System including a plurality of die heads with releasably coupled die chucks and a method of using the sameCANON KK·Filed 2023·Application pending·0 cites
- 4859US2014117574A1Strain and Kinetics Control During Separation Phase of Imprint ProcessKHUSNATDINOV NIYAZ·Filed 2014·Application pending·0 cites
- 4958US2015165671A1Safe separation for nano imprintingCANON NANOTECHNOLOGIES INC·Filed 2015·Application pending·0 cites
- 5056US11550216B2Systems and methods for curing a shaped filmCANON KK·Filed 2019·Granted Jan 10, 2023·0 cites·17 claims
Showing the top 50 of 63 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →