Assignee
GANAPATHISUBRAMANIAN MAHADEVAN
US·4 granted patents·37 citations·filing 2009–2010
Top patents by PatentIndex Score
4 records- 0192US8215946B2Imprint lithography system and methodGANAPATHISUBRAMANIAN MAHADEVAN·Filed 2009·Granted Jul 10, 2012·24 cites·16 claims
- 0285US8913230B2Chucking system with recessed support featureGANAPATHISUBRAMANIAN MAHADEVAN·Filed 2010·Granted Dec 16, 2014·4 cites·19 claims
- 0376US8237133B2Energy sources for curing in an imprint lithography systemGANAPATHISUBRAMANIAN MAHADEVAN·Filed 2009·Granted Aug 7, 2012·6 cites·18 claims
- 0469US9164375B2Dual zone template chuckGANAPATHISUBRAMANIAN MAHADEVAN·Filed 2010·Granted Oct 20, 2015·3 cites·11 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →