Inventor · disambiguated record
Sumanth Banda
Also filed as: BANDA SUMANTH
21 granted patents·7 pending applications·128 citations·filing 2011–2024
94Inventor score
Top patents by PatentIndex Score
28 records- 0198US10570257B2Copolymerized high temperature bonding componentAPPLIED MATERIALS INC·Filed 2016·Granted Feb 25, 2020·35 cites·20 claims
- 0296US11380572B2Substrate support carrier with improved bond layer protectionAPPLIED MATERIALS INC·Filed 2020·Granted Jul 5, 2022·4 cites·20 claims
- 0394US10745805B2Plasma resistant coating of porous body by atomic layer depositionAPPLIED MATERIALS INC·Filed 2017·Granted Aug 18, 2020·10 cites·24 claims
- 0493US8916021B2Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereofSUN JENNIFER·Filed 2011·Granted Dec 23, 2014·33 cites·18 claims
- 0592US9358702B2Temperature management of aluminium nitride electrostatic chuckAPPLIED MATERIALS INC·Filed 2013·Granted Jun 7, 2016·14 cites·16 claims
- 0690US9610591B2Showerhead having a detachable gas distribution plateAPPLIED MATERIALS INC·Filed 2013·Granted Apr 4, 2017·8 cites·20 claims
- 0789US8982530B2Methods and apparatus toward preventing ESC bonding adhesive erosionAPPLIED MATERIALS INC·Filed 2012·Granted Mar 17, 2015·8 cites·11 claims
- 0887US10847402B2Bond protection around porous plugsAPPLIED MATERIALS INC·Filed 2018·Granted Nov 24, 2020·4 cites·18 claims
- 0985US9850591B2High purity aluminum top coat on substrateAPPLIED MATERIALS INC·Filed 2014·Granted Dec 26, 2017·2 cites·18 claims
- 1084US11130142B2Showerhead having a detachable gas distribution plateAPPLIED MATERIALS INC·Filed 2020·Granted Sep 28, 2021·1 cites·20 claims
- 1183US10975469B2Plasma resistant coating of porous body by atomic layer depositionAPPLIED MATERIALS INC·Filed 2017·Granted Apr 13, 2021·3 cites·18 claims
- 1283US10625277B2Showerhead having a detachable gas distribution plateAPPLIED MATERIALS INC·Filed 2017·Granted Apr 21, 2020·2 cites·20 claims
- 1380US11666952B2Condition selectable backside gasAPPLIED MATERIALS INC·Filed 2020·Granted Jun 6, 2023·1 cites·6 claims
- 1479US10899892B2Copolymerized high temperature bonding componentAPPLIED MATERIALS INC·Filed 2019·Granted Jan 26, 2021·0 cites·20 claims
- 1576US9447365B2Enhanced cleaning process of chamber used plasma spray coating without damaging coatingAPPLIED MATERIALS INC·Filed 2013·Granted Sep 20, 2016·3 cites·16 claims
- 1675US2024404835A1Chambers and coatings for reducing backside damageAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1771US11651987B2Substrate support carrier with improved bond layer protectionAPPLIED MATERIALS INC·Filed 2022·Granted May 16, 2023·0 cites·20 claims
- 1871US10774436B2High purity aluminum top coat on substrateAPPLIED MATERIALS INC·Filed 2017·Granted Sep 15, 2020·0 cites·18 claims
- 1970US12397330B2Condition selectable backside gasAPPLIED MATERIALS INC·Filed 2023·Granted Aug 26, 2025·0 cites·19 claims
- 2066US12094716B2Chambers and coatings for reducing backside damageAPPLIED MATERIALS INC·Filed 2021·Granted Sep 17, 2024·0 cites·19 claims
- 2157US12033881B2Reduced localized force in electrostatic chuckingAPPLIED MATERIALS INC·Filed 2021·Granted Jul 9, 2024·0 cites·18 claims
- 2257US9597734B2Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereofAPPLIED MATERIALS INC·Filed 2014·Granted Mar 21, 2017·0 cites·11 claims
- 2357US2024429089A1Adjustable edge ring tilt for edge of wafer skew compensationAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2448US2012255635A1Method and apparatus for refurbishing gas distribution plate surfacesBANDA SUMANTH·Filed 2012·Application pending·0 cites
- 2545US2015183187A1Methods and apparatus toward preventing esc bonding adhesive erosionAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
- 2639US2013344285A1Adhesive material used for joining chamber componentsSUN JENNIFER Y·Filed 2011·Application pending·0 cites
- 2739US2018337026A1Erosion resistant atomic layer deposition coatingsAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 2839US2012118510A1Method for debonding components in a chamberBANDA SUMANTH·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →