Inventor · disambiguated record
Hwankook Chae
Also filed as: CHAE HWANKOOK
4 granted patents·4 pending applications·13 citations·filing 2008–2011
69Inventor score
Top patents by PatentIndex Score
8 records- 0170US8652296B2Side gas injector for plasma reaction chamberKIM MINSHIK·Filed 2010·Granted Feb 18, 2014·5 cites·9 claims
- 0269US8158068B2Plasma reactorPARK KUNJOO·Filed 2009·Granted Apr 17, 2012·5 cites·5 claims
- 0353US8815047B2Plasma chemical reactorCHAE HWANKOOK·Filed 2008·Granted Aug 26, 2014·2 cites·4 claims
- 0448US8323522B2Plasma reactor and etching method using the sameJANG HYEOKJIN·Filed 2010·Granted Dec 4, 2012·1 cites·8 claims
- 0541US2010110605A1Electrostatic chuck assembly for plasma reactorLEE WEONMOOK·Filed 2009·Application pending·0 cites
- 0630US2011203735A1Gas injection system for etching profile controlSEO SEONGSUL·Filed 2011·Application pending·0 cites
- 0729US2011154843A1Apparatus for controlling temperature of electrostatic chuck comprising two-stage refrigerant fluid channelKO SUNGYONG·Filed 2010·Application pending·0 cites
- 0827US2011042009A1Plasma etching deviceLEE DONGSEOK·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →