Apparatus for controlling temperature of electrostatic chuck comprising two-stage refrigerant fluid channel

Abstract

An apparatus for controlling the temperature of an electrostatic chuck is provided. The apparatus includes an electrostatic chuck including, as a fluid channel part for circulating a refrigerant, a first fluid channel formed in an outer circumference region of the internal and a second fluid channel formed in the whole internal region, and one or more chillers for supplying refrigerant controlled to different temperatures through the first fluid channel or the second fluid channel. The first and second fluid channels are formed in two up/down stages within the electrostatic chuck, thereby being independently capable of the temperatures of a center part and edge part of a wafer.

1 . An apparatus for controlling the temperature of an electrostatic chuck, the apparatus comprising:
 an electrostatic chuck comprising a first fluid channel and a second fluid channel as a fluid channel part for circulating a refrigerant, the first fluid channel being formed in an outer circumference region of the internal of the electrostatic chuck, and the second fluid channel being formed in the whole region of the internal of the electrostatic chuck; and   one or more chillers for supplying refrigerant controlled to different temperatures through the first fluid channel or the second fluid channel.   
     
     
         2 . The apparatus of  claim 1 , wherein the first fluid channel and the second fluid channel are formed in two up/down stages within the electrostatic chuck. 
     
     
         3 . The apparatus of  claim 1 , wherein the first fluid channel and the second fluid channel are shaped in a plane spiral structure. 
     
     
         4 . The apparatus of  claim 1 , further comprising: between the chiller and the fluid channel part,
 an opening/closing valve for controlling the flow of refrigerant between the chiller and the fluid channel part; and   a circulating valve for returning refrigerant flowing out from the chiller, and only internally circulating the refrigerant.   
     
     
         5 . The apparatus of  claim 4 , wherein the circulating valve is installed between the chiller and the opening/closing valve.