Inventor · disambiguated record
Ernst Hendrik August Granneman
Also filed as: GRANNEMAN ERNST · GRANNEMAN ERNST H A · GRANNEMAN ERNST HENDRIK AUGUST
22 granted patents·3 pending applications·2,630 citations·filing 1998–2020
97Inventor score
Technology areasH10P
Top patents by PatentIndex Score
25 records- 0198US7312156B2Method and apparatus for supporting a semiconductor wafer during processingASM INT·Filed 2004·Granted Dec 25, 2007·294 cites·25 claims
- 0298US6613685B1Method for supporting a semiconductor wafer during processingASM INT·Filed 2000·Granted Sep 2, 2003·379 cites·46 claims
- 0398US6461439B1Apparatus for supporting a semiconductor wafer during processingASM INT·Filed 2000·Granted Oct 8, 2002·371 cites·44 claims
- 0498US6183565B1Method and apparatus for supporting a semiconductor wafer during processingASM INT·Filed 1999·Granted Feb 6, 2001·502 cites·41 claims
- 0597US6607602B1Device for processing semiconductor wafersASM INT·Filed 1998·Granted Aug 19, 2003·349 cites·22 claims
- 0695US7410355B2Method for the heat treatment of substratesASM INT·Filed 2006·Granted Aug 12, 2008·60 cites·27 claims
- 0794US6240875B1Vertical oven with a boat for the uniform treatment of wafersASM INT·Filed 1999·Granted Jun 5, 2001·348 cites·13 claims
- 0891US6805749B2Method and apparatus for supporting a semiconductor wafer during processingASM INT·Filed 2003·Granted Oct 19, 2004·38 cites·27 claims
- 0989US6329304B1Floating wafer reactor and method for the regulation of the temperature thereofM INTERNAT N V AS·Filed 2000·Granted Dec 11, 2001·57 cites·6 claims
- 1088US7048488B1Apparatus for transferring wafer and ringASM INT·Filed 2000·Granted May 23, 2006·51 cites·9 claims
- 1186US7022627B2Method for the heat treatment of substratesASM INT·Filed 2003·Granted Apr 4, 2006·40 cites·51 claims
- 1285US9478449B2Floating substrate monitoring and control device, and method for the sameVERMONT PASCAL GUSTAAF·Filed 2012·Granted Oct 25, 2016·20 cites·24 claims
- 1385US6770851B2Method and apparatus for the treatment of substratesASM INT·Filed 2002·Granted Aug 3, 2004·37 cites·22 claims
- 1484US9243330B2Apparatus and method for high-throughput atomic layer depositionGRANNEMAN ERNST H A·Filed 2009·Granted Jan 26, 2016·17 cites·18 claims
- 1584US9238867B2Apparatus and method for high-throughput atomic layer depositionGRANNEMAN ERNST H A·Filed 2009·Granted Jan 19, 2016·11 cites·16 claims
- 1680US6877250B2Apparatus, method and system for the treatment of a waferASM INT·Filed 2002·Granted Apr 12, 2005·21 cites·9 claims
- 1772US6843201B2Temperature control for single substrate semiconductor processing reactorASM INTERNAT NV·Filed 2002·Granted Jan 18, 2005·20 cites·50 claims
- 1868US10738382B2Substrate processing apparatusASM INT NV·Filed 2014·Granted Aug 11, 2020·3 cites·6 claims
- 1966US6560896B2Apparatus, method and system for the treatment of a waferASM INT·Filed 2000·Granted May 13, 2003·9 cites·15 claims
- 2065US10648078B2Atomic layer deposition apparatus and method for processing substrates using an apparatusASM INT NV·Filed 2015·Granted May 12, 2020·1 cites·9 claims
- 2162US10837107B2Method and apparatus for contactlessly advancing substratesGRANNEMAN ERNST HENDRIK AUGUST·Filed 2011·Granted Nov 17, 2020·2 cites·8 claims
- 2256US11339474B2Atomic layer deposition apparatus and method for processing substrates using an apparatusASM INT NV·Filed 2020·Granted May 24, 2022·0 cites·6 claims
- 2349US2017076935A1Floating wafer track with lateral stabilization mechanismASM INT NV·Filed 2016·Application pending·0 cites
- 2441US2012291707A1Floating wafer track with lateral stabilization mechanismGRANNEMAN ERNST HENDRIK AUGUST·Filed 2010·Application pending·0 cites
- 2534US2001047761A1Vertical oven with a boat for the uniform treatment of wafersFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →