Inventor · disambiguated record
Akiyoshi Mitsumori
Also filed as: MITSUMORI AKIYOSHI
13 granted patents·4 pending applications·11 citations·filing 2017–2020
84Inventor score
Files withTOKYO ELECTRON LTD17
Top patents by PatentIndex Score
17 records- 0189US10825660B2Electrostatic chuck and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Nov 3, 2020·5 cites·15 claims
- 0283US10796889B2Processing apparatus for target object and inspection method for processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Oct 6, 2020·3 cites·7 claims
- 0373US10665432B2Temperature control methodTOKYO ELECTRON LTD·Filed 2019·Granted May 26, 2020·1 cites·17 claims
- 0469US10818480B2Method of operating electrostatic chuck of plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Oct 27, 2020·1 cites·6 claims
- 0568US11404251B2Processing apparatus for processing target objectTOKYO ELECTRON LTD·Filed 2018·Granted Aug 2, 2022·1 cites·6 claims
- 0667US11476095B2Electrostatic chuck and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Oct 18, 2022·0 cites·6 claims
- 0762US10910200B2Plasma processing apparatus and precoating methodTOKYO ELECTRON LTD·Filed 2019·Granted Feb 2, 2021·0 cites·6 claims
- 0855US11566728B2Flexible pipe and temperature control systemTOKYO ELECTRON LTD·Filed 2019·Granted Jan 31, 2023·0 cites·14 claims
- 0953US10787950B2Heat insulating pipe system and processing systemTOKYO ELECTRON LTD·Filed 2019·Granted Sep 29, 2020·0 cites·17 claims
- 1052US2017250058A1Plasma processing apparatus and precoating methodTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 1146US12068143B2Temperature adjustment methodTOKYO ELECTRON LTD·Filed 2019·Granted Aug 20, 2024·0 cites·8 claims
- 1246US11869799B2Temperature adjustment systemTOKYO ELECTRON LTD·Filed 2019·Granted Jan 9, 2024·0 cites·6 claims
- 1344US11236420B2Cleaning methodTOKYO ELECTRON LTD·Filed 2019·Granted Feb 1, 2022·0 cites·7 claims
- 1443US11060770B2Cooling systemTOKYO ELECTRON LTD·Filed 2019·Granted Jul 13, 2021·0 cites·8 claims
- 1542US2019304759A1Temperature adjustment systemTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 1642US2019304760A1Temperature adjustment methodTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 1737US2018218887A1Processing apparatus for processing target objectTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →