Temperature adjustment method

Abstract

A temperature adjustment method according to one exemplary embodiment is a temperature adjustment method of adjusting a temperature of a loading table on which a workpiece is loaded using a refrigerant. The step of increasing the temperature of the loading table includes a step of adjusting the temperature of the loading table to a first temperature by opening an expansion valve between an output terminal of a condenser and an input terminal of a heat exchange unit and adjusting an opening degree of the expansion valve, and a step of adjusting the temperature of the loading table to a second temperature by opening the expansion valve, inputting heat to the loading table, opening a flow dividing valve between an output terminal of a compressor and the input terminal of the heat exchange unit, and adjusting an opening degree of the flow dividing valve.

What is claimed is: 
     
         1 . A temperature adjustment method of adjusting a temperature of a loading table on which a workpiece is loaded using a refrigerant, the method comprising:
 a step of increasing the temperature of the loading table,   wherein the step of increasing the temperature of the loading table includes
 a step of adjusting the temperature of the loading table to a first temperature by opening an expansion valve between an output terminal of a condenser and an input terminal of a heat exchange unit and adjusting an opening degree of the expansion valve, the condenser condensing the refrigerant after being discharged from the heat exchange unit disposed in the loading table and compressed and supplying the refrigerant to the heat exchange unit, and 
 a step of adjusting the temperature of the loading table to a second temperature by opening the expansion valve, inputting heat to the loading table, opening a flow dividing valve between an output terminal of a compressor and the input terminal of the heat exchange unit, and adjusting an opening degree of the flow dividing valve, the compressor compressing the refrigerant discharged from the heat exchange unit and supplying the refrigerant to the condenser, and 
   the second temperature is higher than the first temperature.   
     
     
         2 . The temperature adjustment method according to  claim 1 ,
 wherein in the step of adjusting the temperature of the loading table to the second temperature,
 in a case where the temperature of the loading table reaches the second temperature, the flow dividing valve is closed, and 
 from a timing of opening the flow dividing valve until a timing of closing the flow dividing valve, adjusting the opening degree of the expansion valve is started such that the temperature of the loading table becomes equal to the second temperature in a case where the flow dividing valve is in a closed state. 
   
     
     
         3 . The temperature adjustment method according to  claim 1 ,
 wherein in the step of increasing the temperature of the loading table,
 in a case where increasing the temperature of the loading table is finished, inputting heat to the loading table is finished. 
   
     
     
         4 . The temperature adjustment method according to  claim 1 ,
 wherein the loading table is disposed inside a processing container of a plasma processing apparatus.   
     
     
         5 . The temperature adjustment method according to  claim 4 ,
 wherein inputting heat to the loading table is performed using plasma.   
     
     
         6 . The temperature adjustment method according to  claim 1 ,
 wherein the loading table includes a heater, and   inputting heat to the loading table is performed by the heater.