Inventor · disambiguated record
Ellis Chang
Also filed as: CHANG ELLIS · CHANG ELLIS E-LI
27 granted patents·6 pending applications·683 citations·filing 2003–2022
97Inventor score
Top patents by PatentIndex Score
33 records- 0198US7570796B2Methods and systems for utilizing design data in combination with inspection dataKLA TENCOR TECH CORP·Filed 2006·Granted Aug 4, 2009·286 cites·88 claims
- 0297US9401014B2Methods and systems for utilizing design data in combination with inspection dataKLA-TENCOR TECH CORP·Filed 2014·Granted Jul 26, 2016·22 cites·103 claims
- 0396US7904845B2Determining locations on a wafer to be reviewed during defect reviewKLA TENCOR CORP·Filed 2007·Granted Mar 8, 2011·50 cites·24 claims
- 0496US7571422B2Method for generating a design rule map having spatially varying overlay budgetKLA TENCOR TECH CORP·Filed 2007·Granted Aug 4, 2009·36 cites·16 claims
- 0595US8559001B2Inspection guided overlay metrologyCHANG ELLIS·Filed 2011·Granted Oct 15, 2013·35 cites·22 claims
- 0693US8194968B2Methods and systems for using electrical information for a device being fabricated on a wafer to perform one or more defect-related functionsPARK ALLEN·Filed 2008·Granted Jun 5, 2012·33 cites·85 claims
- 0792US9170209B1Inspection guided overlay metrologyKLA TENCOR CORP·Filed 2013·Granted Oct 27, 2015·11 cites·24 claims
- 0891US8923600B2Methods and systems for utilizing design data in combination with inspection dataZAFAR KHURRAM·Filed 2009·Granted Dec 30, 2014·33 cites·23 claims
- 0990US9151712B1Rule checking for metrology and inspectionADEL MICHAEL·Filed 2008·Granted Oct 6, 2015·16 cites·38 claims
- 1089US10387608B2Metrology target identification, design and verificationKLA TENCOR CORP·Filed 2017·Granted Aug 20, 2019·6 cites·38 claims
- 1188US7711514B2Computer-implemented methods, carrier media, and systems for generating a metrology sampling planKLA TENCOR TECH CORP·Filed 2007·Granted May 4, 2010·19 cites·22 claims
- 1286US9087367B2Determining design coordinates for wafer defectsCHANG ELLIS·Filed 2012·Granted Jul 21, 2015·11 cites·27 claims
- 1385US9910953B2Metrology target identification, design and verificationKLA TENCOR CORP·Filed 2014·Granted Mar 6, 2018·7 cites·25 claims
- 1485US8594823B2Scanner performance comparison and matching using design and defect dataPARK ALLEN·Filed 2010·Granted Nov 26, 2013·9 cites·12 claims
- 1582US8948495B2Inspecting a wafer and/or predicting one or more characteristics of a device being formed on a waferKLA TENCOR CORP·Filed 2013·Granted Feb 3, 2015·8 cites·37 claims
- 1681US7093207B1Data analysis flow engineKLA TENCOR TECH CORP·Filed 2003·Granted Aug 15, 2006·46 cites·16 claims
- 1780US8139844B2Methods and systems for determining a defect criticality index for defects on wafersCHEN CHIEN-HUEI ADAM·Filed 2008·Granted Mar 20, 2012·11 cites·19 claims
- 1879US9002497B2Methods and systems for inspection of wafers and reticles using designer intent dataVOLK WILLIAM·Filed 2004·Granted Apr 7, 2015·14 cites·39 claims
- 1976US9659670B2Computer-implemented methods, computer-readable media, and systems for classifying defects detected in a memory device area on a waferCHOI SUNYONG·Filed 2009·Granted May 23, 2017·20 cites·60 claims
- 2075US10713771B2Methods and systems for inspection of wafers and reticles using designer intent dataKLA TENCOR TECH CORPORATION·Filed 2018·Granted Jul 14, 2020·1 cites·29 claims
- 2175US9518932B2Metrology optimized inspectionKLA TENCOR CORP·Filed 2014·Granted Dec 13, 2016·2 cites·37 claims
- 2270US9576861B2Method and system for universal target based inspection and metrologyKLA TENCOR CORP·Filed 2013·Granted Feb 21, 2017·2 cites·25 claims
- 2370US8826200B2Alteration for wafer inspectionKLA TENCOR CORP·Filed 2013·Granted Sep 2, 2014·2 cites·21 claims
- 2470US2022230293A1Method and system for mixed mode wafer inspectionKLA CORP·Filed 2022·Application pending·0 cites
- 2565US11348222B2Methods and systems for inspection of wafers and reticles using designer intent dataKLA TENCOR TECH CORPORATION·Filed 2019·Granted May 31, 2022·0 cites·30 claims
- 2661US8989479B2Region based virtual fourier filterGAO LISHENG·Filed 2011·Granted Mar 24, 2015·3 cites·35 claims
- 2759US11295438B2Method and system for mixed mode wafer inspectionKLA TENCOR CORP·Filed 2018·Granted Apr 5, 2022·0 cites·9 claims
- 2857US2008081385A1Methods and systems for inspection of wafers and reticles using designer intent dataMARELLA PAUL F·Filed 2007·Application pending·0 cites
- 2956US2015178914A1Methods and Systems for Inspection of Wafers and Reticles Using Designer Intent DataKLA TENCOR TECH CORP·Filed 2015·Application pending·0 cites
- 3053US10192303B2Method and system for mixed mode wafer inspectionKLA TENCOR CORP·Filed 2013·Granted Jan 29, 2019·0 cites·34 claims
- 3150US2017161418A1Using three-dimensional representations for defect-related applicationsKLA TENCOR CORP·Filed 2017·Application pending·0 cites
- 3246US2012316855A1Using Three-Dimensional Representations for Defect-Related ApplicationsPARK ALLEN·Filed 2011·Application pending·0 cites
- 3344US2015120220A1Detecting IC Reliability DefectsKLA TENCOR CORP·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →