Inventor · disambiguated record
Tamotsu Abe
Also filed as: ABE TAMOTSU
48 granted patents·5 pending applications·306 citations·filing 1985–2018
98Inventor score
Top patents by PatentIndex Score
53 records- 0194US10172225B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2018·Granted Jan 1, 2019·5 cites·7 claims
- 0294US9986629B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2016·Granted May 29, 2018·5 cites·8 claims
- 0394US7999241B2Extreme ultraviolet light source apparatusGIGAPHOTON INC·Filed 2009·Granted Aug 16, 2011·40 cites·12 claims
- 0493US8558202B2Extreme ultraviolet light source apparatusYANAGIDA TATSUYA·Filed 2011·Granted Oct 15, 2013·14 cites·24 claims
- 0591US8872142B2Extreme ultraviolet light generation apparatusNAGAI SHINJI·Filed 2012·Granted Oct 28, 2014·9 cites·40 claims
- 0691US7880153B2Extreme ultra violet light source apparatusKOMATSU MFG CO LTD·Filed 2008·Granted Feb 1, 2011·14 cites·15 claims
- 0790US8000361B2Laser systemKOMATSU MFG CO LTD·Filed 2009·Granted Aug 16, 2011·10 cites·25 claims
- 0889US10102938B2Extreme ultraviolet light generating apparatusGIGAPHOTON INC·Filed 2018·Granted Oct 16, 2018·5 cites·20 claims
- 0988US7923705B2Extreme ultra violet light source apparatusGIGAPHOTON INC·Filed 2009·Granted Apr 12, 2011·25 cites·30 claims
- 1085US10764986B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2016·Granted Sep 1, 2020·2 cites·20 claims
- 1185US8536550B2Method and apparatus for cleaning collector mirror in EUV light generatorASAYAMA TAKESHI·Filed 2009·Granted Sep 17, 2013·7 cites·15 claims
- 1285US8492738B2Apparatus for and method of withdrawing ions in EUV light production apparatusUENO YOSHIFUMI·Filed 2012·Granted Jul 23, 2013·6 cites·11 claims
- 1385US8242474B2Extreme ultraviolet light generation apparatusNAGAI SHINJI·Filed 2011·Granted Aug 14, 2012·6 cites·25 claims
- 1484US8256441B2Method for cleaning optical element of EUV light source device and optical element cleaning deviceMORIYA MASATO·Filed 2008·Granted Sep 4, 2012·15 cites·6 claims
- 1583US8624208B2Extreme ultraviolet light generation systemNAGAI SHINJI·Filed 2011·Granted Jan 7, 2014·8 cites·26 claims
- 1682US8436328B2Extreme ultraviolet light source apparatusYANAGIDA TATSUYA·Filed 2009·Granted May 7, 2013·14 cites·16 claims
- 1781US8003962B2Extreme ultraviolet light source apparatus and nozzle protection deviceGIGAPHOTON INC·Filed 2009·Granted Aug 23, 2011·13 cites·22 claims
- 1880US8698112B2Extreme ultraviolet light generation apparatusYABU TAKAYUKI·Filed 2012·Granted Apr 15, 2014·5 cites·12 claims
- 1979US8629417B2Extreme ultraviolet light generation apparatusNAGAI SHINJI·Filed 2012·Granted Jan 14, 2014·4 cites·13 claims
- 2078US8569723B2Extreme ultraviolet light source apparatusNAGAI SHINJI·Filed 2011·Granted Oct 29, 2013·4 cites·12 claims
- 2178US8536551B2Extreme ultra violet light source apparatusMORIYA MASATO·Filed 2009·Granted Sep 17, 2013·10 cites·14 claims
- 2277US9731848B2Bread conveying apparatusOSHIKIRI MACHINERY LTD·Filed 2014·Granted Aug 15, 2017·5 cites·24 claims
- 2377US7842937B2Extreme ultra violet light source apparatusKOMATSU MFG CO LTD·Filed 2008·Granted Nov 30, 2010·4 cites·12 claims
- 2476US10314152B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2016·Granted Jun 4, 2019·2 cites·18 claims
- 2575US8173984B2Extreme ultraviolet light source apparatusMORIYA MASATO·Filed 2009·Granted May 8, 2012·8 cites·27 claims
- 2674US8212228B2Extreme ultra violet light source apparatusABE TAMOTSU·Filed 2009·Granted Jul 3, 2012·9 cites·16 claims
- 2773US9510433B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2014·Granted Nov 29, 2016·2 cites·6 claims
- 2873US8445877B2Extreme ultraviolet light source apparatus and target supply deviceSOMEYA HIROSHI·Filed 2011·Granted May 21, 2013·3 cites·22 claims
- 2972US8705035B2Target generation deviceGIGAPHOTON INC·Filed 2013·Granted Apr 22, 2014·3 cites·4 claims
- 3072US8294129B2Extreme ultraviolet light source apparatusMORIYA MASATO·Filed 2011·Granted Oct 23, 2012·3 cites·7 claims
- 3171US8759804B2Chamber apparatus and extreme ultraviolet light generation systemNISHISAKA TOSHIHIRO·Filed 2011·Granted Jun 24, 2014·3 cites·18 claims
- 3271US8507883B2Extreme ultraviolet light source apparatusENDO AKIRA·Filed 2009·Granted Aug 13, 2013·8 cites·19 claims
- 3366US8324601B2Extreme ultra violet light source apparatusHOSHINO HIDEO·Filed 2010·Granted Dec 4, 2012·2 cites·19 claims
- 3465US7732794B2Extreme ultra violet light source apparatusKOMATSU MFG CO LTD·Filed 2008·Granted Jun 8, 2010·6 cites·11 claims
- 3563US8450706B2Extreme ultraviolet light source apparatusABE TAMOTSU·Filed 2009·Granted May 28, 2013·6 cites·16 claims
- 3662US2014166046A1Method and apparatus for cleaning collector mirror in euv light generatorGIGAPHOTON INC·Filed 2013·Application pending·0 cites
- 3761US8288743B2Apparatus for and method of withdrawing ions in EUV light production apparatusUENO YOSHIFUMI·Filed 2009·Granted Oct 16, 2012·4 cites·21 claims
- 3860US8698116B2Extreme ultra violet light source apparatusGIGAPHOTON INC·Filed 2013·Granted Apr 15, 2014·1 cites·12 claims
- 3957US7683355B2Extreme ultra violet light source apparatusKOMATSU MFG CO LTD·Filed 2007·Granted Mar 23, 2010·4 cites·9 claims
- 4051US9872372B2Extreme ultraviolet light generation deviceGIGAPHOTON INC·Filed 2016·Granted Jan 16, 2018·0 cites·20 claims
- 4151US8804902B2Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatusGIGAPHOTON INC·Filed 2013·Granted Aug 12, 2014·0 cites·10 claims
- 4250US2014001369A1Chamber apparatus and extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2013·Application pending·0 cites
- 4350US2011261844A1Laser systemGIGAPHOTON INC·Filed 2011·Application pending·0 cites
- 4449US10126657B2Extreme ultraviolet light generating apparatusGIGAPHOTON INC·Filed 2018·Granted Nov 13, 2018·0 cites·17 claims
- 4547US8817838B2Laser device with optical element module on separate plateABE TAMOTSU·Filed 2008·Granted Aug 26, 2014·0 cites·11 claims
- 4647US2012298134A1Method for cleaning optical element of euv light source device and optical element cleaning deviceMORIYA MASATO·Filed 2012·Application pending·0 cites
- 4745US2012228527A1Extreme ultra violet light source apparatusABE TAMOTSU·Filed 2012·Application pending·0 cites
- 4843US9310686B2Target supply device and target supply methodGIGAPHOTON INC·Filed 2013·Granted Apr 12, 2016·0 cites·6 claims
- 4941US9942973B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2017·Granted Apr 10, 2018·0 cites·17 claims
- 5040US8477412B2Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatusSOMEYA HIROSHI·Filed 2007·Granted Jul 2, 2013·0 cites·2 claims
Showing the top 50 of 53 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →