Inventor · disambiguated record
Tomohiro Funakoshi
Also filed as: FUNAKOSHI TOMOHIRO
15 granted patents·9 pending applications·56 citations·filing 2000–2014
91Inventor score
Top patents by PatentIndex Score
24 records- 0186US7884948B2Surface inspection tool and surface inspection methodHITACHI HIGH TECH CORP·Filed 2009·Granted Feb 8, 2011·7 cites·13 claims
- 0277US9224575B2Charged particle beam device and overlay misalignment measurement methodHITACHI HIGH TECH CORP·Filed 2013·Granted Dec 29, 2015·3 cites·16 claims
- 0377US8995748B2Defect image processing apparatus, defect image processing method, semiconductor defect classifying apparatus, and semiconductor defect classifying methodSAKAI TSUNEHIRO·Filed 2010·Granted Mar 31, 2015·7 cites·13 claims
- 0477US7885789B2Recipe parameter management system and recipe parameter management methodHITACHI HIGH TECH CORP·Filed 2009·Granted Feb 8, 2011·4 cites·12 claims
- 0575US8041443B2Surface defect data display and management system and a method of displaying and managing a surface defect dataHITACHI HIGH TECH CORP·Filed 2009·Granted Oct 18, 2011·5 cites·11 claims
- 0674US8653456B2Pattern inspection method, pattern inspection program, and electronic device inspection systemTOYODA YASUTAKA·Filed 2011·Granted Feb 18, 2014·3 cites·18 claims
- 0774US8209135B2Wafer inspection data handling and defect review toolFUNAKOSHI TOMOHIRO·Filed 2011·Granted Jun 26, 2012·4 cites·10 claims
- 0874US7606409B2Data processing equipment, inspection assistance system, and data processing methodHITACHI HIGH TECH CORP·Filed 2005·Granted Oct 20, 2009·10 cites·20 claims
- 0971US8189205B2Surface inspection tool and surface inspection methodMIYOSHI YUJI·Filed 2010·Granted May 29, 2012·2 cites·12 claims
- 1066US8625906B2Image classification standard update method, program, and image classification deviceISOMAE YUYA·Filed 2009·Granted Jan 7, 2014·4 cites·18 claims
- 1165US8358406B2Defect inspection method and defect inspection systemHITACHI HIGH TECH CORP·Filed 2009·Granted Jan 22, 2013·2 cites·10 claims
- 1263US8472696B2Observation condition determination support device and observation condition determination support methodKONISHI JUNKO·Filed 2009·Granted Jun 25, 2013·3 cites·16 claims
- 1359US8462352B2Surface inspection tool and surface inspection methodMIYOSHI YUJI·Filed 2012·Granted Jun 11, 2013·0 cites·8 claims
- 1454US2013258351A1Surface inspection tool and surface inspection methodHITACHI HIGH TECH CORP·Filed 2013·Application pending·0 cites
- 1553US8290241B2Analyzing apparatus, program, defect inspection apparatus, defect review apparatus, analysis system, and analysis methodONO MAKOTO·Filed 2008·Granted Oct 16, 2012·2 cites·13 claims
- 1650US2007105245A1Wafer inspection data handling and defect review toolHITACHI HIGH TECH CORP·Filed 2006·Application pending·0 cites
- 1748US2008298669A1Data processing apparatus and data processing methodHITACHI HIGH TECH CORP·Filed 2008·Application pending·0 cites
- 1843US10141159B2Sample observation device having a selectable acceleration voltageHITACHI HIGH TECH CORP·Filed 2014·Granted Nov 27, 2018·0 cites·13 claims
- 1942US2008240545A1Inspection Assistance System, Data Processing Equipment, and Data Processing MethodHITACHI HIGH TECH CORP·Filed 2008·Application pending·0 cites
- 2042US2008123936A1Method of reviewing defects and an apparatus thereonHITACHI HIGH TECH CORP·Filed 2007·Application pending·0 cites
- 2137US2008226158A1Data Processor and Data Processing MethodHITACHI HIGH TECH CORP·Filed 2008·Application pending·0 cites
- 2237US2011150318A1Data processing system, data processing method, and inspection assist systemFUNAKOSHI TOMOHIRO·Filed 2009·Application pending·0 cites
- 2333US2002068463A1Rapid chemical vapor deposition for spherical semiconductor processingFiled 2000·Application pending·0 cites
- 2431US2012233542A1Defect review support device, defect review device and inspection support deviceFUNAKOSHI TOMOHIRO·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →