Inventor · disambiguated record
Yasunari Suto
Also filed as: SUTO YASUNARI
9 granted patents·2 pending applications·153 citations·filing 2001–2014
90Inventor score
Top patents by PatentIndex Score
11 records- 0191US7854646B2Substrate polishing apparatus and substrate polishing methodEBARA CORP·Filed 2010·Granted Dec 21, 2010·12 cites·7 claims
- 0289US7714572B2Method of detecting characteristics of films using eddy currentEBARA CORP·Filed 2006·Granted May 11, 2010·14 cites·19 claims
- 0387US7046001B2Frequency measuring device, polishing device using the same and eddy current sensorEBARA CORP·Filed 2001·Granted May 16, 2006·36 cites·8 claims
- 0484US7670206B2Substrate polishing apparatus and substrate polishing methodEBARA CORP·Filed 2004·Granted Mar 2, 2010·27 cites·10 claims
- 0583US6746319B2Measuring apparatusEBARA CORP·Filed 2002·Granted Jun 8, 2004·21 cites·18 claims
- 0678US7508201B2Eddy current sensorEBARA CORP·Filed 2004·Granted Mar 24, 2009·22 cites·26 claims
- 0777US7078894B2Polishing device using eddy current sensorEBARA CORP·Filed 2003·Granted Jul 18, 2006·17 cites·6 claims
- 0870US10134614B2Substrate peripheral portion measuring device, and substrate peripheral portion polishing apparatusEBARA CORP·Filed 2014·Granted Nov 20, 2018·2 cites·19 claims
- 0946US6935935B2Measuring apparatusEBARA CORP·Filed 2004·Granted Aug 30, 2005·2 cites·22 claims
- 1044US2008274670A1Substrate Peripheral Portion Measuring Device, and Substrate Peripheral Portion Polishing ApparatusEBARA CORP·Filed 2005·Application pending·0 cites
- 1136US2006164104A1Measuring apparatusTADA MITSUO·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →