Assignee
TADA MITSUO
JP·2 granted patents·2 pending applications·6 citations·filing 2004–2011
Top patents by PatentIndex Score
4 records- 0169US8657644B2Eddy current sensor and polishing method and apparatusTADA MITSUO·Filed 2011·Granted Feb 25, 2014·2 cites·32 claims
- 0266US8696924B2Polishing apparatus and polishing methodTADA MITSUO·Filed 2007·Granted Apr 15, 2014·4 cites·7 claims
- 0340US2011124269A1Eddy current sensor and polishing method and apparatusTADA MITSUO·Filed 2011·Application pending·0 cites
- 0436US2006164104A1Measuring apparatusTADA MITSUO·Filed 2004·Application pending·0 cites
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