Inventor · disambiguated record
Ben-Li Sheu
Also filed as: SHEU BEN-LI
16 granted patents·3 pending applications·21 citations·filing 2009–2024
89Inventor score
Top patents by PatentIndex Score
19 records- 0190US10431493B2Doping control of metal nitride filmsAPPLIED MATERIALS INC·Filed 2018·Granted Oct 1, 2019·5 cites·10 claims
- 0280US10008412B2Doping control of metal nitride filmsAPPLIED MATERIALS INC·Filed 2017·Granted Jun 26, 2018·2 cites·9 claims
- 0376US9916975B2Precursors of manganese and manganese-based compounds for copper diffusion barrier layers and methods of useAPPLIED MATERIALS INC·Filed 2015·Granted Mar 13, 2018·2 cites·20 claims
- 0474US9659814B2Doping control of metal nitride filmsAPPLIED MATERIALS INC·Filed 2014·Granted May 23, 2017·2 cites·12 claims
- 0574US8329585B2Method for reducing line width roughness with plasma pre-etch treatment on photoresistSHEU BEN-LI·Filed 2009·Granted Dec 11, 2012·7 cites·20 claims
- 0673US11587829B2Doping control of metal nitride filmsAPPLIED MATERIALS INC·Filed 2021·Granted Feb 21, 2023·0 cites·19 claims
- 0773US10665542B2Cobalt manganese vapor phase depositionAPPLIED MATERIALS INC·Filed 2018·Granted May 26, 2020·0 cites·20 claims
- 0870US8304262B2Wiggling control for pseudo-hardmaskSHEU BEN-LI·Filed 2011·Granted Nov 6, 2012·2 cites·17 claims
- 0967US10847463B2Seed layers for copper interconnectsAPPLIED MATERIALS INC·Filed 2018·Granted Nov 24, 2020·1 cites·9 claims
- 1063US10910263B2Doping control of metal nitride filmsAPPLIED MATERIALS INC·Filed 2019·Granted Feb 2, 2021·0 cites·12 claims
- 1163US9953926B2Methods of depositing cobalt manganese filmsAPPLIED MATERIALS INC·Filed 2015·Granted Apr 24, 2018·0 cites·9 claims
- 1258US2020219720A1Apparatus and methods for asymmetric deposition of metal on high aspect ratio nanostructuresAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1358US2024310566A1Waveguide Display with Staircase Grating Input CouplerAPPLE INC·Filed 2024·Application pending·0 cites
- 1457US11757074B2Light-emitting diode display pixels with microlens stacks over light-emitting diodesAPPLE INC·Filed 2021·Granted Sep 12, 2023·0 cites·21 claims
- 1556US10283352B2Precursors of manganese and manganese-based compounds for copper diffusion barrier layers and methods of useAPPLIED MATERIALS INC·Filed 2018·Granted May 7, 2019·0 cites·20 claims
- 1655US10636655B2Methods for asymmetric deposition of metal on high aspect ratio nanostructuresAPPLIED MATERIALS INC·Filed 2018·Granted Apr 28, 2020·0 cites·14 claims
- 1750US8470126B2Wiggling control for pseudo-hardmaskLAM RES CORP·Filed 2012·Granted Jun 25, 2013·0 cites·18 claims
- 1848US10892186B2Integration of ALD copper with high temperature PVD copper deposition for BEOL interconnectAPPLIED MATERIALS INC·Filed 2018·Granted Jan 12, 2021·0 cites·13 claims
- 1934US2016032455A1High through-put and low temperature ald copper deposition and integrationAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Ben-Li Sheu files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →