Inventor · disambiguated record
Richard S. Ray
Also filed as: RAY RICHARD · RAY RICHARD S
21 granted patents·5 pending applications·201 citations·filing 2000–2019
95Inventor score
Top patents by PatentIndex Score
26 records- 0197US8062965B2Isotopically-enriched boron-containing compounds, and methods of making and using sameKAIM ROBERT·Filed 2011·Granted Nov 22, 2011·21 cites·20 claims
- 0295US8237134B2Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation systemKAIM ROBERT·Filed 2012·Granted Aug 7, 2012·23 cites·20 claims
- 0393US10247363B2Smart packageENTEGRIS INC·Filed 2016·Granted Apr 2, 2019·7 cites·19 claims
- 0493US8598022B2Isotopically-enriched boron-containing compounds, and methods of making and using sameKAIM ROBERT·Filed 2011·Granted Dec 3, 2013·12 cites·31 claims
- 0593US8399865B2Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation systemKAIM ROBERT·Filed 2012·Granted Mar 19, 2013·11 cites·29 claims
- 0692US8779383B2Enriched silicon precursor compositions and apparatus and processes for utilizing sameADVANCED TECH MATERIALS·Filed 2013·Granted Jul 15, 2014·13 cites·17 claims
- 0790US6559462B1Method to reduce downtime while implanting GeF4IBM·Filed 2000·Granted May 6, 2003·50 cites·34 claims
- 0888US8785889B2Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation systemADVANCED TECH MATERIALS·Filed 2013·Granted Jul 22, 2014·5 cites·54 claims
- 0988US6670624B1Ion implanter in-situ mass spectrometerIBM·Filed 2003·Granted Dec 30, 2003·39 cites·18 claims
- 1083US9171725B2Enriched silicon precursor compositions and apparatus and processes for utilizing sameENTEGRIS INC·Filed 2014·Granted Oct 27, 2015·4 cites·20 claims
- 1183US9012874B2Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation systemENTEGRIS INC·Filed 2014·Granted Apr 21, 2015·3 cites·25 claims
- 1282US10845006B2Smart packageENTEGRIS INC·Filed 2019·Granted Nov 24, 2020·2 cites·13 claims
- 1382US9754786B2Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation systemENTEGRIS INC·Filed 2015·Granted Sep 5, 2017·2 cites·21 claims
- 1480US9142387B2Isotopically-enriched boron-containing compounds, and methods of making and using sameENTEGRIS INC·Filed 2013·Granted Sep 22, 2015·3 cites·11 claims
- 1576US9831063B2Ion implantation compositions, systems, and methodsENTEGRIS INC·Filed 2014·Granted Nov 28, 2017·3 cites·8 claims
- 1676US8138071B2Isotopically-enriched boron-containing compounds, and methods of making and using sameKAIM ROBERT·Filed 2010·Granted Mar 20, 2012·3 cites·10 claims
- 1767US10508773B2Smart packageENTEGRIS INC·Filed 2019·Granted Dec 17, 2019·0 cites·17 claims
- 1860US2017330756A1Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation systemENTEGRIS INC·Filed 2017·Application pending·0 cites
- 1954US11062906B2Silicon implantation in substrates and provision of silicon precursor compositions thereforENTEGRIS INC·Filed 2014·Granted Jul 13, 2021·0 cites·7 claims
- 2054US9812291B2Alternate materials and mixtures to minimize phosphorus buildup in implant applicationsENTEGRIS INC·Filed 2013·Granted Nov 7, 2017·0 cites·3 claims
- 2154US9685304B2Isotopically-enriched boron-containing compounds, and methods of making and using sameENTEGRIS INC·Filed 2015·Granted Jun 20, 2017·0 cites·16 claims
- 2249US2016046849A1Enriched silicon precursor compositions and apparatus and processes for utilizing sameENTEGRIS INC·Filed 2015·Application pending·0 cites
- 2341US2019078696A1Fluid supply packageENTEGRIS INC·Filed 2016·Application pending·0 cites
- 2439US9269582B2Cluster ion implantation of arsenic and phosphorusBYL OLEG·Filed 2012·Granted Feb 23, 2016·0 cites·15 claims
- 2537US2012111374A1Ion implantation tool cleaning apparatus and methodDESPRES JOSEPH R·Filed 2011·Application pending·0 cites
- 2635US2018149315A1Gas cabinetsENTEGRIS INC·Filed 2016·Application pending·0 cites
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