Assignee
NISHIMURA SHINSUKE
0 granted patents·2 pending applications·0 citations·filing 2008–2008
Top patents by PatentIndex Score
2 records- 0161US2011168923A1Demagnification measurement method for charged particle beam exposure apparatus, stage phase measurement method for charged particle beam exposure apparatus, control method for charged particle beam exposure apparatus, and charged particle beam exposure apparatusNISHIMURA SHINSUKE·Filed 2008·Application pending·0 cites
- 0261US2011168911A1Demagnification measurement method for charged particle beam exposure apparatus, stage phase measurement method for charged particle beam exposure apparatus, control method for charged particle beam exposure apparatus, and charged particle beam exposure apparatusNISHIMURA SHINSUKE·Filed 2008·Application pending·0 cites
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