USD956705SActiveUtility

Cooling plate for a semiconductor processing apparatus

58
Assignee: LAM RES CORPPriority: Nov 7, 2019Filed: May 5, 2020Granted: Jul 5, 2022
Est. expiryNov 7, 2039(~13.3 yrs left)· nominal 20-yr term from priority
Inventors:Bin LuoDamien SlevinAllan Jones
58
PatentIndex Score
3
Cited by
22
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       We claim the ornamental design for a cooling plate for a semiconductor processing apparatus, as shown and described.

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