USD1107669SActiveUtility

Processing chamber purge plate

17
Assignee: LAM RES CORPPriority: May 2, 2022Filed: May 2, 2022Granted: Dec 30, 2025
Est. expiryMay 2, 2042(~15.8 yrs left)· nominal 20-yr term from priority
Inventors:Hans Nygren
17
PatentIndex Score
0
Cited by
25
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a processing chamber purge plate, as shown and described.

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