USD1038900SActiveUtility

Showerhead for semiconductor processing

61
Assignee: LAM RES CORPPriority: Sep 30, 2021Filed: Sep 30, 2021Granted: Aug 13, 2024
Est. expirySep 30, 2041(~15.2 yrs left)· nominal 20-yr term from priority
Inventors:Aaron Miller
61
PatentIndex Score
3
Cited by
53
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       I claim the ornamental design for a showerhead for semiconductor processing, as shown and described.

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