Pump, chemical supply unit, and substrate treatment apparatus

Abstract

The present disclosure provides a pump, a chemical supply unit, and a substrate treatment apparatus. A pump according to an embodiment of the present disclosure includes: a case having a pressure space formed therein; a pressurizing member connected to the pressure space by a pressurizing line; and a plurality of tubes disposed in the pressure space and contracted when the pressurizing member supplies a pressure-generating fluid to the pressure space through the pressurizing line.

What is claimed is: 
     
         1 . A pump, comprising:
 a case having a pressure space formed therein;   a pressurizing member connected to the pressure space by a pressurizing line; and   a plurality of tubes disposed in the pressure space and contracted when the pressurizing member supplies a pressure-generating fluid to the pressure space through the pressurizing line.   
     
     
         2 . The pump according to  claim 1 ,
 wherein the case includes:   a case body in which the pressure space is formed to penetrate from one side thereof to the other side thereof;   a first manifold installed on one side of the case body and having a chemical suction hole; and   a second manifold installed on the other side of the case body and having a chemical discharge hole,   wherein the first manifold has a first internal space communicating with the plurality of tubes and the chemical suction hole, and the second manifold has a second internal space communicating with the plurality of tubes and the chemical discharge hole.   
     
     
         3 . The pump according to  claim 2 ,
 wherein the first manifold includes:   a first fixing portion covering one side of the case body and having a plurality of first fixing holes into which one ends of the plurality of tubes are inserted and fixed;   a first ring portion formed in a ring shape to form the first internal space; and   a first cover formed to allow the chemical suction hole to penetrate therethrough,   wherein the first fixing  1  portion, the first ring portion, and the first cover are assembled in a state in which the first ring portion is disposed between the first fixing portion and the first cover.   
     
     
         4 . The pump according to  claim 3 ,
 wherein a bubble removal hole is formed in the first cover so that the bubble removal hole penetrates through the first cover, and the bubble removal hole is formed to communicate with the first internal space.   
     
     
         5 . The pump according to  claim 2 ,
 wherein the second manifold includes:   a second fixing portion covering the other side of the case body and having a plurality of second fixing holes into which the other ends of the plurality of tubes are inserted and fixed;   a second ring portion formed in a ring shape to form the second internal space; and   a second cover formed to allow the chemical discharge hole to penetrate therethrough,   wherein the second fixing portion, the second ring portion, and the second cover are assembled in a state in which the second ring portion is disposed between the second fixing portion and the second cover.   
     
     
         6 . The pump according to  claim 2 ,
 wherein a pressurizing hole communicating with the pressure space is formed in the case body, and the pressurizing line is connected to the pressurizing hole and   an exhaust hole communicating with the pressure space is formed in the case body.   
     
     
         7 . The pump according to  claim 1 ,
 wherein the pressurizing member is configured to supply pressurized gas as the pressure-generating fluid.   
     
     
         8 . The pump according to  claim 1 , further comprising:
 a plurality of shrinkage detection sensors installed in the case and detecting a shrinkage amount of the plurality of tubes.   
     
     
         9 . A chemical supply unit, comprising:
 a storage tank in which a chemical is stored;   a supply pipe extending from the storage tank to a nozzle unit;   a pump installed in the supply pipe and supplying the chemical to the nozzle unit through a plurality of tubes,   wherein the pump includes:   a case having a pressure space formed therein;   a pressurizing member connected to the pressure space through a pressurizing line; and   a plurality of tubes disposed in the pressure space and contracted when the pressurizing member supplies a pressure-generating fluid to the pressure space through the pressurizing line.   
     
     
         10 . The chemical supply unit according to  claim 9 ,
 wherein the case includes:   a case body formed so that the pressure space penetrates from one side thereof to the other side thereof;   a first manifold installed on one side of the case body and having a chemical suction hole; and   a second manifold installed on the other side of the case body and having a chemical discharge hole,   wherein the first manifold has a first internal space communicating with the plurality of tubes and the chemical suction hole, and the second manifold has a second internal space communicating with the plurality of tubes and the chemical discharge hole.   
     
     
         11 . The chemical supply unit according to  claim 10 ,
 wherein the first manifold includes:   a first fixing portion covering one side of the case body and having a plurality of first fixing holes into which one ends of the plurality of tubes are inserted and fixed;   a first ring portion formed in a ring shape to form the first internal space; and   a first cover formed to allow the chemical suction hole to penetrate therethrough,   wherein the first fixing portion, the first ring portion, and the first cover are assembled in a state in which the first ring portion is disposed between the first fixing portion and the first cover.   
     
     
         12 . The chemical supply unit according to  claim 11 ,
 wherein bubble removal hole is formed in the first cover so that the bubble removal hole penetrates through the first cover, and the bubble removal hole is formed to communicate with the first internal space.   
     
     
         13 . The chemical supply unit according to  claim 10 ,
 wherein the second manifold includes:   a second fixing portion covering the other side of the case body and having a plurality of second fixing holes into which the other ends of the plurality of tubes are inserted and fixed;   a second ring portion formed in a ring shape to form the second internal space; and   a second cover formed to allow the chemical discharge hole to penetrate therethrough,   wherein the second fixing portion, the second ring portion, and the second cover are assembled in a state in which the second ring portion is disposed between the second fixing portion and the second cover.   
     
     
         14 . The chemical supply unit according to  claim 10 ,
 wherein a pressurizing hole communicating with the pressure space is formed in the case body, and the pressurizing line is connected to the pressurizing hole, and   an exhaust hole communicating with the pressure space is formed in the case body.   
     
     
         15 . The chemical supply unit according to  claim 9 ,
 wherein the pressurizing member is configured to supply a pressurized gas as the pressure-generating fluid.   
     
     
         16 . The chemical supply unit according to  claim 9 , further comprising:
 a shrinkage detection sensor installed in the case and detecting a shrinkage amount for a plurality of tubes.   
     
     
         17 . A substrate treatment apparatus, comprising:
 a process chamber;   a treatment container installed in the process chamber and having a processing space for processing a substrate;   a support unit supporting the substrate in the processing space;   a nozzle unit discharging a chemical to the substrate supported by the support unit;   a chemical supply unit supplying the chemical to the nozzle unit,   wherein the chemical supply unit includes:   a storage tank in which the chemical is stored;   a supply pipe extending from the storage tank to the nozzle unit; and   a pump installed in the supply pipe and supplying the chemical to the nozzle unit through a plurality of tubes,   wherein the pump includes:   a case having a pressure space formed therein;   a pressurizing member connected to the pressure space through a pressurizing line; and   a plurality of tubes disposed in the pressure space and contracted when the pressurizing member supplies a pressure-generating fluid to the pressure space through the pressurizing line.   
     
     
         18 . The substrate treatment apparatus according to  claim 17 , wherein the case includes:
 a case body formed so that the pressure space penetrates from one side thereof to the other side thereof;   a first manifold installed on one side of the case body and having a chemical suction hole; and   a second manifold installed on the other side of the case body and having a chemical discharge hole,   wherein the first manifold has a first internal space communicating with the plurality of tubes and the chemical suction hole, and the second manifold has a second internal space communicating with the plurality of tubes and the chemical discharge hole.   
     
     
         19 . The substrate treatment apparatus according to  claim 17 , wherein the pressurizing member is configured to supply a pressurized gas as the pressure-generating fluid. 
     
     
         20 . The substrate treatment apparatus according to  claim 17 , further comprising:
 a shrinkage detection sensor installed on the case and detecting a shrinkage amount of the plurality of tubes.