Assignee
SEMES CO LTD
KR·786 granted patents·837 pending applications·1,113 citations·filing 2003–2025
Top patents by PatentIndex Score
1,623 records- 0195US12211675B2Apparatus for treating substrate and method for treating a substrateSEMES CO LTD·Filed 2022·Granted Jan 28, 2025·2 cites·10 claims
- 0295US9987747B2Stocker for receiving cassettes and method of teaching a stocker robot disposed thereinSEMES CO LTD·Filed 2016·Granted Jun 5, 2018·409 cites·16 claims
- 0395US9506695B2Substrate treating apparatus and methodSEMES CO LTD·Filed 2014·Granted Nov 29, 2016·19 cites·20 claims
- 0494US12207362B2Support unit, substrate treating apparatus including the same and temperature control methodSEMES CO LTD·Filed 2021·Granted Jan 21, 2025·3 cites·16 claims
- 0594US12025921B2Cooling unit, substrate treating apparatus including the same, and substrate treating method using the sameSEMES CO LTD·Filed 2021·Granted Jul 2, 2024·2 cites·17 claims
- 0694US11942337B2Apparatus and method for treating substrateSEMES CO LTD·Filed 2020·Granted Mar 26, 2024·4 cites·8 claims
- 0793US11664212B2Substrate treating apparatus and liquid supplying methodSEMES CO LTD·Filed 2021·Granted May 30, 2023·5 cites·12 claims
- 0893US11626309B2Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2021·Granted Apr 11, 2023·3 cites·14 claims
- 0993US11340533B2Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2021·Granted May 24, 2022·5 cites·20 claims
- 1093US11043403B2Substrate support unit and substrate processing apparatus having the same including reflective member configured to reflect light toward substrateSEMES CO LTD·Filed 2019·Granted Jun 22, 2021·8 cites·27 claims
- 1193US10197333B2Method and apparatus for drying substrateSEMES CO LTD·Filed 2016·Granted Feb 5, 2019·14 cites·16 claims
- 1293US10109506B2Unit for supplying fluid, apparatus and method for treating substrate with the unitSEMES CO LTD·Filed 2017·Granted Oct 23, 2018·13 cites·10 claims
- 1393US9275847B2Recycling unit and substrate treating apparatusSEMES CO LTD·Filed 2014·Granted Mar 1, 2016·28 cites·33 claims
- 1493US7618599B2Reaction chamber for manufacturing a carbon nanotube, apparatus for manufacturing the carbon nanotube and system for manufacturing the carbon nanotubeSEMES CO LTD·Filed 2007·Granted Nov 17, 2009·30 cites·26 claims
- 1592US11529655B2Nozzle, substrate processing apparatus including the same, and substrate processing methodSEMES CO LTD·Filed 2020·Granted Dec 20, 2022·3 cites·19 claims
- 1691US11923213B2Substrate heating unit, substrate processing apparatus, and substrate processing methodSEMES CO LTD·Filed 2020·Granted Mar 5, 2024·3 cites·17 claims
- 1791US11600515B2Die pickup module and die bonding apparatus including the sameSEMES CO LTD·Filed 2020·Granted Mar 7, 2023·6 cites·18 claims
- 1891US11545340B2Apparatus for monitoring pulsed high-frequency power and substrate processing apparatus including the sameSEMES CO LTD·Filed 2020·Granted Jan 3, 2023·4 cites·20 claims
- 1991US10289005B2Unit for supplying liquid, apparatus for treating a substrate, and method for treating a substrateSEMES CO LTD·Filed 2018·Granted May 14, 2019·10 cites·18 claims
- 2091US7611182B2Wafer transfer apparatusSEMES CO LTD·Filed 2005·Granted Nov 3, 2009·32 cites·12 claims
- 2191US7323080B2Apparatus for treating substrateSEMES CO LTD·Filed 2005·Granted Jan 29, 2008·32 cites·18 claims
- 2290US12138670B2Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2021·Granted Nov 12, 2024·2 cites·12 claims
- 2390US11823874B2Substrate treating apparatus and method for controlling temperature of ferrite coreSEMES CO LTD·Filed 2021·Granted Nov 21, 2023·2 cites·16 claims
- 2490US11756815B2Apparatus for and method of monitoring warpage of substrate, substrate treatment apparatus, and substrate-type sensorSEMES CO LTD·Filed 2020·Granted Sep 12, 2023·4 cites·19 claims
- 2590US10490427B2Apparatus for treating substrateSEMES CO LTD·Filed 2015·Granted Nov 26, 2019·9 cites·9 claims
- 2689US12181504B2Apparatus and method for inspecting electrostatic chuckSEMES CO LTD·Filed 2022·Granted Dec 31, 2024·2 cites·20 claims
- 2789US10908503B2Apparatus for treating substrateSEMES CO LTD·Filed 2019·Granted Feb 2, 2021·7 cites·11 claims
- 2889US9922850B2Apparatus for treating substrateSEMES CO LTD·Filed 2015·Granted Mar 20, 2018·6 cites·15 claims
- 2989US7866058B2Spin head and substrate treating method using the sameSEMES CO LTD·Filed 2007·Granted Jan 11, 2011·17 cites·15 claims
- 3088US12441557B2Apparatus and method for transporting articlesSEMES CO LTD·Filed 2022·Granted Oct 14, 2025·2 cites·20 claims
- 3188US12176234B2Assembly and method for transferring substrateSEMES CO LTD·Filed 2022·Granted Dec 24, 2024·2 cites·20 claims
- 3288US11897005B2Nozzle, substrate processing apparatus including the same, and substrate processing methodSEMES CO LTD·Filed 2022·Granted Feb 13, 2024·1 cites·13 claims
- 3388US11890639B2Apparatus for treating substrateSEMES CO LTD·Filed 2020·Granted Feb 6, 2024·2 cites·13 claims
- 3488US11621159B2Method for treating substrateSEMES CO LTD·Filed 2020·Granted Apr 4, 2023·2 cites·19 claims
- 3588US11456198B2Transfer unit and substrate treating apparatus including ihe sameSEMES CO LTD·Filed 2020·Granted Sep 27, 2022·4 cites·16 claims
- 3688US9642238B2Antenna structure and plasma generating deviceSEMES CO LTD·Filed 2016·Granted May 2, 2017·4 cites·3 claims
- 3787US12222159B2Apparatus and method for treating substrateSEMES CO LTD·Filed 2021·Granted Feb 11, 2025·2 cites·19 claims
- 3887US12051565B2Substrate treating apparatus and impedance matching methodSEMES CO LTD·Filed 2021·Granted Jul 30, 2024·2 cites·10 claims
- 3987US11485132B2Method of maintaining an ink jet head and printing method using an ink jet headSEMES CO LTD·Filed 2020·Granted Nov 1, 2022·2 cites·14 claims
- 4087US11148150B2Liquid dispensing nozzle and substrate treating apparatusSEMES CO LTD·Filed 2019·Granted Oct 19, 2021·17 cites·12 claims
- 4187US11011405B2Apparatus for supporting substrate having gas supply hole and method of manufacturing sameSEMES CO LTD·Filed 2019·Granted May 18, 2021·4 cites·13 claims
- 4287US10796891B2Substrate processing apparatus and substrate processing methodSEMES CO LTD·Filed 2018·Granted Oct 6, 2020·10 cites·8 claims
- 4387US9587880B2Apparatus and method for drying substrateSEMES CO LTD·Filed 2013·Granted Mar 7, 2017·9 cites·5 claims
- 4486US12399134B2Substrate inspection apparatus and substrate treatment system including the sameSEMES CO LTD·Filed 2023·Granted Aug 26, 2025·1 cites·20 claims
- 4586US12347694B2Method and apparatus for treating substrateSEMES CO LTD·Filed 2022·Granted Jul 1, 2025·1 cites·16 claims
- 4686US12230510B2Substrate treating apparatus and method for the sameSEMES CO LTD·Filed 2021·Granted Feb 18, 2025·1 cites·17 claims
- 4786US11850635B2Apparatus for processing substrateSEMES CO LTD·Filed 2021·Granted Dec 26, 2023·3 cites·18 claims
- 4886US11804371B2Substrate treatment apparatus and method of performing treatment process on substrateSEMES CO LTD·Filed 2020·Granted Oct 31, 2023·2 cites·19 claims
- 4986US10274827B2Substrate treating apparatus and substrate treating methodSEMES CO LTD·Filed 2017·Granted Apr 30, 2019·4 cites·4 claims
- 5086US2026088252A1Apparatus for treating substrate and method for treating substrateSEMES CO LTD·Filed 2025·Application pending·0 cites
Showing the top 50 of 1,623 patent records by PatentIndex Score.
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