Back nozzle, substrate treating apparatus and method for manufacturing back nozzle

Abstract

The present disclosure provides a back nozzle, a substrate treating apparatus, and a method for manufacturing a back nozzle. The back nozzle according to an embodiment of the present disclosure includes a base module formed with a central nozzle pipe; and a plurality of side modules installed along the side portion of the base module, some of which have peripheral nozzle pipes formed thereon.

What is claimed is: 
     
         1 . A back nozzle, comprising:
 a base module formed with a central nozzle pipe; and   a plurality of side modules installed along a side portion of the base module, some of which have peripheral nozzle pipes formed thereon.   
     
     
         2 . The back nozzle of  claim 1 , wherein the central nozzle pipe is integrally formed with the base module, and the peripheral nozzle pipe is integrally formed with the side module. 
     
     
         3 . The back nozzle of  claim 2 , wherein the base module has a plurality of pipe holes formed around the central nozzle pipe, and
 the peripheral nozzle pipe is inserted into the pipe holes and assembled.   
     
     
         4 . The back nozzle of  claim 3 , wherein the remainder of the plurality of side modules are formed with assembly pillars, and
 the assembly pillars are inserted into the pipe holes and assembled.   
     
     
         5 . The back nozzle of  claim 2 , wherein the base module has a plurality of base holes formed along the side portion thereof,
 the side module is formed with a side hole corresponding to the base hole, and   the side module is fixed to the base module by fastening a bolt member to the side hole and the base hole.   
     
     
         6 . A substrate treating apparatus, comprising:
 a plurality of process chambers respectively performing a process on a substrate;   a support unit disposed within the process chamber and supporting the substrate; and   a back nozzle unit disposed to penetrate through the support unit,   wherein the back nozzle unit includes a supply unit with a built-in chemical liquid supply line or gas supply line; and a back nozzle connected to the chemical liquid supply line or the gas supply line, installed at an upper end of the supply unit, and spraying a chemical liquid or gas toward a bottom side of the substrate, and   the back nozzle includes a base module formed with a central nozzle pipe; and a plurality of side modules installed along the side portion of the base module, some of which have peripheral nozzle pipes formed thereon.   
     
     
         7 . The substrate treating apparatus of  claim 6 , wherein the central nozzle pipe is integrally formed with the base module, and
 the peripheral nozzle pipe is integrally formed with the side module.   
     
     
         8 . The substrate treating apparatus of  claim 7 , wherein the base module has a pipe hole formed around the central nozzle pipe, and
 the peripheral nozzle pipe is inserted into the pipe hole and assembled.   
     
     
         9 . The substrate treating apparatus of  claim 8 , wherein the remainder of the plurality of side modules is formed with an assembly pillar, and
 the assembly pillar is inserted into the pipe hole and assembled.   
     
     
         10 . The substrate treating apparatus of  claim 7 , wherein the base module has a plurality of base holes formed along the side portion thereof,
 the side module is formed with a side hole corresponding to the base hole, and   the side module is fixed to the base module by fastening a bolt member to the side hole and the base hole.   
     
     
         11 . A method for manufacturing a back nozzle, comprising:
 a module injection operation of forming a plurality of modules by injecting a resin liquid to form parts of a back nozzle having a nozzle pipe; and   a module assembly operation of assembling the plurality of modules to make the back nozzle,   wherein the nozzle pipe formed in at least one of the plurality of modules is integrally formed with the module.   
     
     
         12 . The method of  claim 11 , wherein the plurality of modules includes one base module and a plurality of side modules, the nozzle pipe includes a peripheral nozzle pipe formed on the side module, and
 the module injection operation includes: a base injection operation of manufacturing the base module in which a plurality of pipe holes are formed; and   a side portion injection operation of manufacturing the plurality of side modules, and   in the side portion injection operation, some of the plurality of side modules are formed with the peripheral nozzle pipe corresponding to the pipe holes.   
     
     
         13 . The method of  claim 12 , wherein the nozzle pipe further includes a central nozzle pipe formed in the base module, and
 in the base injection operation, a central portion of the base module is formed with the central nozzle pipe.   
     
     
         14 . The method of  claim 12 , wherein in the base injection operation, a plurality of base holes are formed along the side portion of the base module, and
 in the side portion injection operation, the side module is formed with a side hole corresponding to the base hole.   
     
     
         15 . The method of  claim 14 , wherein the module assembly operation includes:
 a module arrangement operation of arranging the plurality of side modules in the base module so that the base hole and the side hole communicate with each other; and   a module fixing operation of fixing the side module to the base module by fastening a bolt member to the side hole and the base hole.   
     
     
         16 . The method of  claim 15 , wherein the module assembly operation further includes a peripheral nozzle pipe insertion operation of inserting the peripheral nozzle pipes of some of the plurality of side modules into the pipe holes of the base module, before the module arrangement operation. 
     
     
         17 . The method of  claim 15 , wherein in the side portion injection operation, the remainder of the plurality of side modules are formed with assembly pillars corresponding to the pipe holes. 
     
     
         18 . The method of  claim 17 , wherein the module assembly operation further includes an assembly pillar insertion operation of inserting the assembly pillars of the remainder of the plurality of side modules into the pipe holes of the base module, before the module arrangement operation. 
     
     
         19 . The method of  claim 12 , wherein in the side portion injection operation, the peripheral nozzle pipe is formed in a structure where an upper end portion is closed, and
 the method for manufacturing a back nozzle further includes a pipe end cutting operation of cutting the closed upper end portion of the peripheral nozzle pipe to form a pipe outlet, after the module assembly operation.   
     
     
         20 . The method of  claim 19 , wherein in the pipe end cutting operation, the closed upper end portion of the peripheral nozzle pipe is cut horizontally or obliquely to select a direction of the pipe outlet.