Replaceable module for a charged particle apparatus

Abstract

Disclosed herein is a module for supporting a device configured to manipulate charged particle paths in a charged particle apparatus, the module comprising: a support arrangement configured to support the device, wherein the device is configured to manipulate a charged particle path within the charged particle apparatus; and a support positioning system configured to move the support arrangement within the module; wherein the module is arranged to be field replaceable in the charged particle apparatus.

1 . A module for supporting a device configured to manipulate charged particle paths in a charged particle apparatus, the module comprising:
 a device configured to manipulate a charged particle path in the charged particle apparatus;   a support arrangement configured to support the device;   a support positioning system configured to move the support arrangement within the module and configured at least to rotate the support arrangement around the charged particle path so as to align the device with the charged particle path; and   a module flange configured to attach to, and detach from, a housing flange of a housing of the charged particle apparatus such that the module is arranged to be field replaceable in the charged particle apparatus.   
     
     
         2 . The module according to  claim 1 , wherein the support positioning system is configured to move the support arrangement in at least three degrees of freedom of movement. 
     
     
         3 . The module according to  claim 1 , further comprising a position detecting system configured to determine the movement and/or position of the support arrangement and/or a device held by the support arrangement, wherein the position detecting system preferably comprises a grid mark, such as an encoder, for use in determining the movement and/or position of the support arrangement and/or a device held by the support arrangement. 
     
     
         4 . The module according to  claim 1 , further comprising receiving parts that are configured to receive the respective ends of actuator arms of a charged particle apparatus, wherein the actuator arms are preferably comprised by actuators that are external to the module; and the support positioning system is configured to be moved by the actuators. 
     
     
         5 . The module according to  claim 1 , wherein the support positioning system comprises:
 a disc; and   a plurality of load bearing rotatable objects configured to support the disc within the module.   
     
     
         6 . The module according to  claim 1 , wherein the support positioning system comprises a flexure arrangement. 
     
     
         7 . The module according to  claim 6 , wherein the flexure arrangement comprises an Rz flexure arrangement for rotational movement about a z axis and an x-y flexure arrangement, wherein the Rz flexure arrangement and the x-y flexure arrangement are arranged in a stack. 
     
     
         8 . The module according to  claim 1 , wherein, the support positioning system comprises one or more linear actuators. 
     
     
         9 . The module according to  claim 8 , wherein each actuator is a piezo-electric actuator arrangement. 
     
     
         10 . The module according to  claim 9 , wherein each piezo-electric actuator arrangement comprises a two axis shear mode piezo-electric device. 
     
     
         11 . The module according to  claim 8 , wherein the number of linear actuators comprised by the support positioning system is three. 
     
     
         12 . The module according to  claim 8 , wherein the support positioning system comprises a stage, wherein the actuators are configured so that all of the actuators may be operated together to move the stage in a first direction in the plane of the stage. 
     
     
         13 . The module according to  claim 12 , wherein the actuators are configured so that all of the actuators may be operated together to move the stage in a second direction in the plane of the stage, wherein the second direction is orthogonal to the first direction. 
     
     
         14 . The module according to  claim 1 , wherein the charged particle apparatus comprises a source and an objective lens, wherein the charged particle path in the charged particle apparatus, is between a source and an objective lens. 
     
     
         15 . A module for supporting a device configured to manipulate the paths of charged particles in a charged particle apparatus, the module comprising:
 a module flange configured to attach to, and detach from, a housing flange of a housing of the charged particle apparatus such that the module is field replaceable in the charged particle apparatus, wherein, when the module is in use in the charged particle apparatus with the module supporting a device, the device is configured to manipulate a charged particle path that is substantially along the charged particle axis of the charged particle apparatus.   
     
     
         16 . The module according to  claim 15 , further comprising:
 a device support arrangement for supporting the device; and   a mechanism for adjusting the position of the device support arrangement in at least one degree of freedom of movement.   
     
     
         17 . A charged particle apparatus comprising a field replaceable module according to  claim 1 . 
     
     
         18 . The charged particle apparatus according to  claim 17 , wherein the one or more manipulator arrangements are configured to adjust the charged particle path, and/or the module is configured to adjust the position of the device, such that the charged particle path is aligned with device, 
     
     
         19 . The charged particle apparatus of  claim 17 , further comprising:
 an up-beam vacuum lock on an up-beam side of the module; and   a down-beam vacuum lock on a down-beam side of the module,   
     
     
         20 . A method of aligning an electron-optical device with a charged particle beam, or multi-beam, within a charged particle apparatus, the method comprising:
 securing a field replaceable module comprising an electron-optical device to a charged particle apparatus to thereby install the electron-optical device in the charged particle apparatus;   applying fine adjustment(s) to the x-position, y-position and/or Rz state of the electron optical device relative to a main body of the module, wherein applying fine adjustment to the Rz state of the electron optical device comprising rotating the electron-optical device around the path of the charged particle path; and   applying an adjustment to the path of a charged particle beam, or multi-beam, within the charged particle apparatus.