Radiation Source Module and Lithographic Apparatus

Abstract

A radiation source comprising: a fuel supply device configured to supply fuel; an excitation device configured to excite the fuel into a plasma; a collector configured to collect radiation emitted by the plasma and to direct the radiation to a beam exit; a debris mitigation system configured to collect debris generated by the plasma, the debris mitigation system having a component having a conduit passing therethrough; and a temperature control system configured to selectively increase or decrease the temperature of the component by selectively heating or cooling a thermal transfer fluid circulating through the conduit.

1 - 27 . (canceled) 
     
     
         28 . A radiation source comprising:
 a fuel supply device configured to supply fuel;   an excitation device configured to excite the fuel into a plasma;   a collector configured to collect radiation emitted by the plasma and to direct the radiation to a beam exit;   a debris mitigation system configured to collect debris generated by the plasma, the debris mitigation system having a component having a conduit passing therethrough; and   a temperature control system configured to selectively increase or decrease the temperature of the component by selectively heating or cooling a thermal transfer fluid circulating through the conduit.   
     
     
         29 . The radiation source of  claim 28 , wherein the temperature control system is operative in a first mode to cool the component to a first temperature that is below the melting point of the fuel and is operative in a second mode to heat the component to a second temperature that is above the melting point of the fuel. 
     
     
         30 . The radiation source of  claim 28 , wherein the thermal transfer fluid comprises water. 
     
     
         31 . The radiation source of  claim 30 , wherein the thermal transfer fluid is at a pressure greater than atmospheric or greater than about 20 bar. 
     
     
         32 . The radiation source of  claim 28 , wherein the thermal transfer fluid comprises air, artificial air, or nitrogen. 
     
     
         33 . The radiation source of  claim 32 , wherein the temperature control system comprises a heat exchanger configured to transfer heat from thermal transfer fluid coming from the component to heat transfer fluid heading towards the component. 
     
     
         34 . The radiation source of  claim 33 , wherein the temperature control system comprises an active flow control device on the cool side of the heat exchanger. 
     
     
         35 . The radiation source of  claim 28 , further comprising:
 a vacuum chamber enclosing the collector and debris mitigation system; and   wherein all active flow control devices of the temperature control system are outside the vacuum chamber.   
     
     
         36 . The radiation source of  claim 28 , wherein the component comprises a source chamber wall, an obscuration member, a scrubber, a vane, a heat shield, a shroud for a fuel supply trajectory, a droplet catcher or a debris bucket. 
     
     
         37 . The radiation source of  claim 28 , wherein:
 the debris mitigation system comprises a plurality of components each having a conduit passing therethrough, and   the temperature control system comprises a plurality of independently controllable circuits configured to circulate the thermal transfer fluid through respective components.   
     
     
         38 . The radiation source of  claim 37 , wherein the plurality of independently controllable circuits comprises a first circuit configured to maintain a first set of components at a temperature lower than the melting point of the fuel and a second set of components at a temperature higher than the melting point of the fuel. 
     
     
         39 . The radiation source of  claim 28 , wherein the debris mitigation system comprises a plurality of components each having a conduit passing therethrough, and the temperature control system comprises a circuit configured to circulate the thermal transfer fluid through a plurality of the components in series. 
     
     
         40 . The radiation source of  claim 28 , wherein the fuel supply device comprises a droplet generator configured to supply droplets of tin as the fuel. 
     
     
         41 . The radiation source of  claim 28 , wherein the excitation source comprises a laser. 
     
     
         42 . A lithographic apparatus comprising:
 a radiation source comprising:
 a fuel supply device configured to supply fuel; 
 an excitation device configured to excite the fuel into a plasma; 
 a collector configured to collect radiation emitted by the plasma and to direct the radiation to a beam exit; 
 a debris mitigation system configured to collect debris generated by the plasma, the debris mitigation system having a component having a conduit passing therethrough; and 
 a temperature control system configured to selectively increase or decrease the temperature of the component by selectively heating or cooling a thermal transfer fluid circulating through the conduit; 
 an illumination system configured to illuminate a patterning device with radiation from the radiation source; and 
 a projection system arranged to project a pattern from the patterning device onto a substrate.