US2020020602A1PendingUtilityA1
Hermetic lid seal printing method
Est. expiryOct 9, 2037(~11.2 yrs left)· nominal 20-yr term from priority
H10W 99/00H10W 95/00H10W 76/60H01L 21/50H01L 21/4803H01L 23/10
52
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Claims
Abstract
A method is provided. The method includes one or more of securing a die into a cavity of a hermetic package base, providing one or more bond connections to the die, placing a hermetic package lid on the package base, and 3D printing, by a 3D printer, hermetic lid seal material to a joint between the hermetic package base and the hermetic package lid, at a temperature at or below 100 degrees Celsius.
Claims
exact text as granted — not AI-modified1 . A method, comprising:
securing a die into a cavity of a hermetic package base; providing one or more bond connections to the die; placing a hermetic package lid on the package base; and 3D printing, by a 3D printer, hermetic lid seal material to a joint between the hermetic package base and the hermetic package lid, at a temperature at or below 100 degrees Celsius.
2 . The method as recited in claim 1 , further comprising:
clamping the hermetic package lid to the hermetic package base prior to 3D printing hermetic lid seal material.
3 . The method as recited in claim 1 , wherein the die comprises a device that may be damaged at temperatures over 300 degrees Celsius, wherein the hermetic lid seal material is a hermetic compound.
4 . The method as recited in claim 3 , wherein the hermetic package base comprises one of ceramic, metal, or glass, wherein the hermetic package lid comprises one of ceramic, metal, or glass.
5 . The method as recited in claim 4 , wherein the hermetic package base material is different than the hermetic package lid material.
6 . The method as recited in claim 3 , wherein the hermetic lid seal material comprises zinc oxide.
7 . The method as recited in claim 3 , wherein the lid seal material is 3D printed in liquid form.
8 . The method as recited in claim 3 , wherein the 3D printer applies the hermetic lid seal material by a selective laser sintering process, the selective laser sintering process comprising:
3D printing, by a 3D printer, the lid seal material in powder form to a joint between the hermetic package lid and the hermetic package base; and melting the lid seal material, by a laser, to form a hermetic bond between the hermetic package lid and the hermetic package base.
9 . The method as recited in claim 3 , further comprising:
maintaining a die temperature of less than 100 degrees Celsius while 3D printing one or more of the lid seal material or the hermetic overcoat.
10 . The method as recited in claim 3 , further comprising:
3D printing the lid seal material within an inert gas environment.
11 . A method, comprising:
securing a die into a cavity of a hermetic package base; providing one or more bond connections to the die; placing a hermetic package lid on the hermetic package base; 3D printing, by a 3D printer, lid seal material to a joint between the hermetic package base and the hermetic package lid, at a temperature at or below 100 degrees Celsius; and 3D printing a hermetic overcoat over the lid seal material, the hermetic overcoat completely covering the lid seal material.
12 . The method as recited in claim 11 , further comprising:
clamping the hermetic package lid to the hermetic package base prior to 3D printing lid seal material.
13 . The method as recited in claim 11 , wherein the die comprises a device that may be damaged at temperatures over 300 degrees Celsius, wherein the hermetic overcoat material is a hermetic compound.
14 . The method as recited in claim 13 , wherein the hermetic package base comprises one of ceramic, metal, or glass, wherein the hermetic package lid comprises one of ceramic, metal, or glass.
15 . The method as recited in claim 14 , wherein the hermetic package base material is different than the hermetic package lid material.
16 . The method as recited in claim 13 , wherein the hermetic lid seal material comprises zinc oxide.
17 . The method as recited in claim 13 , wherein at least the lid seal material is 3D printed in liquid form.
18 . The method as recited in claim 13 , wherein the 3D printer applies one or more of the lid seal material and the hermetic overcoat by a selective laser sintering process, the selective laser sintering process comprising:
3D printing, by a 3D printer, one or more of the lid seal material and hermetic overcoat material in powder form to a joint between the hermetic package lid and the hermetic package base; and melting, by a laser, one or more of the lid seal material and hermetic overcoat material to form a hermetic bond between the hermetic package lid and the hermetic package base.
19 . The method as recited in claim 13 , further comprising:
maintaining a die temperature of less than 100 degrees Celsius while 3D printing the lid seal material and the hermetic overcoat.
20 . The method as recited in claim 13 , further comprising:
3D printing the lid seal material within a noble gas environment; and 3D printing the hermetic overcoat within a noble gas environment, in response to 3D printing a non-hermetic lid seal material.Join the waitlist — get patent alerts
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