US2019013232A1PendingUtilityA1

Moveable edge ring design

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Assignee: LAM RES CORPPriority: Jan 16, 2015Filed: Sep 14, 2018Published: Jan 10, 2019
Est. expiryJan 16, 2035(~8.5 yrs left)· nominal 20-yr term from priority
Inventors:Haoquan YanRobert Griffith O'NeillRaphael CasaesJon McchesneyAlex Paterson
H10P 72/7611H10P 72/0421H10P 72/7612H01J 37/20H01J 37/32715H01J 37/32623H01J 37/023H01J 37/32642H01J 2237/3344H01L 21/67069H01L 21/68742H01L 21/68735H10P 72/7624H01J 37/32431
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Claims

Abstract

An edge ring is configured to be raised and lowered relative to a pedestal, via one or more lift pins, in a processing chamber of a substrate processing system. The edge ring includes an upper surface, an annular inner diameter, an annular outer diameter, a lower surface, and at least one feature arranged in the lower surface of the edge ring. At least one inner surface of the at least one feature is sloped.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . An edge ring configured to be raised and lowered relative to a pedestal, via one or more lift pins, in a processing chamber of a substrate processing system, the edge ring comprising:
 an upper surface;   an annular inner diameter;   an annular outer diameter;   a lower surface; and   at least one feature arranged in the lower surface of the edge ring, wherein at least one inner surface of the at least one feature is sloped.   
     
     
         2 . The edge ring of  claim 1 , wherein at least two inner surfaces of the at least one feature are sloped. 
     
     
         3 . The edge ring of  claim 1 , wherein the at least one feature is triangular in at least one cross-sectional view. 
     
     
         4 . The edge ring of  claim 1 , wherein the annular inner diameter of the edge ring is configured to overlap an upper plate of the pedestal. 
     
     
         5 . The edge ring of  claim 4 , wherein the at least one feature is arranged in a portion of the lower surface of the edge ring overlapping the upper plate of the pedestal. 
     
     
         6 . The edge ring of  claim 1 , wherein the lower surface of the edge ring is arranged to receive the one or more lift pins. 
     
     
         7 . The edge ring of  claim 1 , wherein the at least one feature comprises a plurality of features each having at least one inner surface that is sloped. 
     
     
         8 . The edge ring of  claim 7 , wherein the plurality of features are circumferentially arranged in a spaced relationship around the lower surface of the edge ring. 
     
     
         9 . The edge ring of  claim 8 , wherein the plurality of features is arranged to align the edge ring relative to the one or more lift pins. 
     
     
         10 . The edge ring of  claim 8 , wherein the plurality of features is arranged to self-center the edge ring relative to the pedestal. 
     
     
         11 . The edge ring of  claim 1 , wherein the at least one feature corresponds to a groove. 
     
     
         12 . A pedestal comprising the edge ring of  claim 1 . 
     
     
         13 . A system comprising the pedestal of  claim 12  and further comprising an actuator configured to raise and lower the one or more lift pins to raise and lower the edge ring.

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