Multi-contact lipseals and associated electroplating methods

Abstract

Disclosed herein are lipseal assemblies for use in an electroplating clamshell for engaging and supplying electrical current to a semiconductor substrate during electroplating, which include an elastomeric lipseal for engaging the semiconductor substrate during electroplating, and wherein upon engagement the elastomeric lipseal forms multiple radially-separated sealing contact surfaces with the substrate which substantially exclude plating solution from a peripheral region of the substrate. Said lipseal assemblies may also include one or more electrical contact elements for supplying electrical current to the semiconductor substrate during electroplating.

1 . A lipseal, comprising:
 an elastomeric support edge comprising a protruding portion that extends upward, the protruding portion comprising multiple ring-shaped protrusions,   wherein the protruding portion is deformable upon compression and uppermost tips of at least two of the ring-shaped protrusions are displaced from each other relative to a direction perpendicular to a radial direction of the ring-shaped protrusions absent deformation.   
     
     
         2 . The lipseal of  claim 1 , wherein the uppermost tips of the multiple ring-shaped protrusions are radially separated from one another by at least about 0.005 inches. 
     
     
         3 . The lipseal of  claim 2 , wherein the uppermost tips of the multiple ring-shaped protrusions are radially separated from one another by at least about 0.01 inches. 
     
     
         4 . The lipseal of  claim 1 , wherein the uppermost tips of the multiple ring-shaped protrusions are displaced from each other relative to the direction perpendicular to the radial direction of the ring-shaped protrusions by a distance between about 0.001 inches and about 0.004 inches. 
     
     
         5 . The lipseal of  claim 1 , wherein the elastomeric support edge comprises a substantially flat portion radially inward of the protruding portion. 
     
     
         6 . The lipseal of  claim 5 , wherein a top surface of the substantially flat portion is configured to receive an electrical contact element that contacts a substrate in a peripheral region of the substrate when the protruding portion is compressed by the substrate so that the electrical contact element is in electrical connection with the substrate. 
     
     
         7 . The lipseal of  claim 6 , wherein the electrical contact element is structurally integrated with at least the substantially flat portion of the elastomeric support edge and comprises a first exposed portion which contacts the peripheral region of the substrate upon compression by the substrate. 
     
     
         8 . The lipseal of  claim 6 , wherein the electrical contact element includes a conductive elastomeric material. 
     
     
         9 . The lipseal of  claim 1 , further comprising:
 an elastomeric upper portion positioned above the elastomeric support edge and radially inward of the protruding portion.   
     
     
         10 . The lipseal of  claim 1 , wherein the multiple ring-shaped protrusions form multiple radially-separated sealing contact surfaces with a substrate upon compression by the substrate. 
     
     
         11 . The lipseal of  claim 1 , wherein the protruding portion defines a peripheral region of a substrate from which plating solution is excluded upon compression by the substrate. 
     
     
         12 . The lipseal of  claim 1 , wherein the multiple ring-shaped protrusions define one or more gaps between the multiple ring-shaped protrusions. 
     
     
         13 . The lipseal of  claim 1 , wherein the elastomeric support edge comprises silicone. 
     
     
         14 . The lipseal of  claim 1 , wherein the uppermost tips of at least three of the ring-shaped protrusions are displaced from each other relative to the direction perpendicular to the radial direction of the ring-shaped protrusions absent deformation.