Apparatus and method for treating substrate

Abstract

Disclosed is a method for liquid-treating a substrate. In a method for treating a substrate, the substrate may be treated by supplying a treatment liquid onto the rotating substrate by using a first nozzle and a second nozzle, the first nozzle supplies the treatment liquid to an area including a central area on the substrate, and the second nozzle supplies the treatment liquid to a peripheral area of the substrate.

What is claimed is: 
     
         1 . A method for treating a substrate, wherein the substrate is treated by supplying a treatment liquid onto the rotating substrate by using a first nozzle and a second nozzle,
 wherein the first nozzle supplies the treatment liquid to an area including a central area on the substrate, and   wherein the second nozzle supplies the treatment liquid to a peripheral area of the substrate.   
     
     
         2 . The method of  claim 1 , comprising:
 a first supply operation of supplying the treatment liquid onto the substrate by using the first nozzle and supplying the treatment liquid to the peripheral area by using the second nozzle at the same time; and   thereafter, a second supply operation of supplying the treatment liquid by using the first nozzle and stopping supply of the treatment liquid by using the second nozzle.   
     
     
         3 . The method of  claim 2 , wherein in the first supply operation, the first nozzle supplies the treatment liquid while moving a first supply point that is a supply point of the treatment liquid supplied from the first nozzle on the substrate. 
     
     
         4 . The method of  claim 3 , wherein in first supply operation, the second nozzle supplies the treatment liquid such that a second supply point that is a supply point of the treatment liquid supplied from the second nozzle on the substrate is fixed to a first location of the peripheral area. 
     
     
         5 . The method of  claim 4 , wherein in the first supply operation, the first nozzle supplies the treatment liquid while the first supply point moves between the central area and the peripheral area of the substrate. 
     
     
         6 . The method of  claim 4 , wherein the first supply operation is performed while the treatment liquid is supplied while the first supply point moves from the center of the substrate to the first location once. 
     
     
         7 . The method of  claim 6 , wherein in the second supply operation, immediately after the first supply operation is performed, the first nozzle supplies the treatment liquid while the first supply point moves from the first location to an end of the substrate. 
     
     
         8 . The method of  claim 5 , wherein the first supply operation is performed while the first supply point moves from the central area to the peripheral area once. 
     
     
         9 . The method of  claim 5 , wherein the first supply operation is performed while the first supply point reciprocates between the central area and the peripheral area once. 
     
     
         10 . The method of  claim 3 , wherein in the first supply operation, the second nozzle supplies the treatment liquid while a second supply point that is a supply point of the treatment liquid supplied from the second nozzle on the substrate moves between the second location and the third location of the peripheral area, and.
 wherein the second location is a location that is closer to the central area of the substrate than the third location.   
     
     
         11 . The method of  claim 10 , wherein in the first supply operation, the first nozzle supplies the treatment liquid while the first supply point moves between the central area and the peripheral area of the substrate. 
     
     
         12 . The method of  claim 11 , wherein the first supply operation is performed while the first supply point moves from the central area to the peripheral area once. 
     
     
         13 . The method of  claim 11 , wherein the first supply operation is performed while the first supply point reciprocates between the central area and the peripheral area once. 
     
     
         14 . The method of  claim 4 , wherein in the second supply operation, the first nozzle discharges the treatment liquid while the first supply point is fixed to the central area after the treatment liquid is supplied while the first supply point is moved. 
     
     
         15 . The method of  claim 14 , further comprising:
 before the first supply operation, a pre-wet operation of supplying a pre-wet liquid onto the substrate.   
     
     
         16 . The method of  claim 14 , wherein the pre-wet liquid is pure water (DIW). 
     
     
         17 . The method of  claim 1 , wherein in the first supply operation and the second supply operation, the substrate is rotated at 200 to 800 rpms. 
     
     
         18 . The method of  claim 5 , wherein in the first supply operation and the second supply operation, a time period for which the first supply point moves from the central area to the peripheral area once and a time period for which the first supply point moves from the peripheral area to the central area once are 1.0 to 1.2 seconds. 
     
     
         19 . The method of  claim 1 , wherein the treatment liquid is an organic solvent. 
     
     
         20 . The method of  claim 19 , wherein the organic solvent includes isopropyl alcohol (IPA). 
     
     
         21 . The method of  claim 4 , wherein the substrate is a wafer having a diameter of 300 mm, and
 wherein the first location is a location that is spaced apart from the center of the wafer by 140 mm.