Holding Device for an Optical Element in an Objective

Abstract

A holding device for an optical element in an objective has a mount that is connected to the objective, on the one hand, and at least indirectly to the optical element, on the other hand. Arranged between the mount and the optical element is a reinforcing element whose coefficient of thermal expansion corresponds substantially to the coefficient of thermal expansion of the optical element.

1 - 38 . (canceled) 
     
     
         39 . An immersion lithography objective having an optical element comprising:
 a holding device for the optical element having a mount that is connected, on the one hand, to the immersion lithography objective and, on the other hand, at least indirectly to the optical element, there being arranged between the mount and the optical element a reinforcing element, there being arranged between the optical element and the reinforcing element a seal or gasket, the optical element and the reinforcing element being connected to one another by bonding, soldering or a wrung connection, a manipulation device being provided by means of which the optical element can be displaced along an optical axis and/or in a plane perpendicular to the optical axis, and/or can be tilted about an axis perpendicular to the optical axis.