Apparatus for Contained Chemical Surface Treatment

Abstract

Apparatuses for preparing a surface of a substrate using a proximity head includes a carrier to hold and move the substrate along an axis and a proximity head having a head surface with a plurality of outlet ports defined thereon. The proximity head is defined to be positioned proximate and over the carrier and the surface of the substrate. A length of the head surface of the proximity head is defined to be greater than a diameter of the substrate and at least partially overlapping over the carrier when the substrate is present. The proximity head includes a first set of outlet ports in a first region defining a first applicator that is configured to apply a non-Newtonian fluid between a surface of the carrier and the head surface of the proximity head. A second set of outlet ports in a second region of the proximity head defines a second applicator that is configured to apply a first chemistry to the surface of the substrate when present. The second region is adjacent to the first region. A third set of outlet ports in a third region of the proximity head defines a third applicator that is configured to apply the non-Newtonian fluid between the head surface of the proximity head and the surface of the substrate when present. The third region is defined adjacent to the second region. A fourth set of outlet ports is defined in the second region of the proximity head to substantially remove the first chemistry from the surface of the substrate when present.

1 . An apparatus for preparing a surface of a substrate using a proximity head, comprising:
 a carrier to hold and move the substrate along an axis;   a proximity head having a head surface with a plurality of outlet ports defined thereon, the proximity head defined to be positioned proximate and over the carrier and the surface of the substrate, a length of the head surface of the proximity head being greater than a diameter of the substrate and at least partially overlapping over the carrier when the substrate is present, the proximity head includes,
 a first set of outlet ports in a first region of the proximity head defining a first applicator configured to apply a non-Newtonian fluid between a surface of the carrier and the head surface of the proximity head; 
 a second set of outlet ports in a second region of the proximity head defining a second applicator configured to apply a first chemistry to the surface of the substrate when present, the second region being adjacent to the first region; 
 a third set of outlet ports in a third region of the proximity head defining a third applicator configured to apply the non-Newtonian fluid between the head surface of the proximity head and the surface of the substrate when present, the third region defined adjacent to the second region; and 
 a fourth set of outlet ports defined in the second region of the proximity head to substantially remove the first chemistry from the surface of the substrate when present. 
   
     
     
         2 . The apparatus of  claim 1 , further includes one or more controls to control the application and flow of the non-Newtonian fluid and the first chemistry to the surface of the substrate when present, the controls communicatively coupled to a computer for automatic monitoring and adjusting of the flow of the non-Newtonian fluid and the first chemistry. 
     
     
         3 . The apparatus of  claim 1 , wherein the first applicator and the third applicator are each defined to apply the non-Newtonian fluid in an area outside of an edge exclusion region of the substrate. 
     
     
         4 . The apparatus of  claim 1 , wherein the first region is defined at a leading edge of the proximity head and the second region is defined at a trailing edge of the proximity head. 
     
     
         5 . An apparatus for preparing a surface of a substrate using a proximity head, comprising:
 a carrier to hold and move the substrate along an axis;   a proximity head having a head surface with a plurality of outlet ports defined thereon, the proximity head defined to be positioned proximate and over the carrier and the surface of the substrate, a length of the head surface of the proximity head being greater than a diameter of the substrate and at least partially overlapping over the carrier when the substrate is present, the proximity head includes,
 a first set of outlet ports in a first region of the proximity head defining a first applicator configured to apply a non-Newtonian fluid between a surface of the carrier and the head surface of the proximity head; 
 a second set of outlet ports in a second region of the proximity head defining a second applicator configured to apply a first chemistry to the surface of the substrate when present, the second region being adjacent to the first region; 
 a third set of outlet ports in a third region of the proximity head defining a third applicator configured to apply a second chemistry to the surface of the substrate when present, the third region defined apart from the second region; 
 a fourth set of outlet ports in a fourth region of the proximity head defining a fourth applicator configured to apply the non-Newtonian fluid between the head surface of the proximity head and the surface of the substrate when present, the fourth region defined in between the second and the third regions of the proximity head; 
 a fifth set of outlet ports defined in a fifth region of the proximity head defining a fifth applicator configured to apply the non-Newtonian fluid between the head surface of the proximity head and the surface of the substrate when present, the fifth region defined adjacent to the third region; 
 a sixth set of outlet ports defined in the second region of the proximity head to substantially remove the first chemistry applied to the surface of the substrate when present; and 
 a seventh set of outlet ports defined in the third region of the proximity head to substantially remove the second chemistry applied to the surface of the substrate when present. 
   
     
     
         6 . The apparatus of  claim 5 , wherein the first applicator is defined to apply the non-Newtonian fluid in an area outside of an edge exclusion region of the substrate, wherein the first region is defined at a leading edge of the proximity head. 
     
     
         7 . The apparatus of  claim 5 , wherein the second applicator is defined to apply the first chemistry to at least a first portion of the surface of the substrate when present, wherein the first chemistry is one of a Newtonian fluid or a second non-Newtonian fluid that is different from the non-Newtonian fluid. 
     
     
         8 . The apparatus of  claim 7 , wherein the third applicator is defined to apply the second chemistry to at least a second portion of the surface of the substrate when present, the second portion being different from the first portion, wherein the second chemistry is one of a second Newtonian fluid that is different from the Newtonian fluid or a second non-Newtonian fluid that is different from the non-Newtonian fluid. 
     
     
         9 . The apparatus of  claim 8 , wherein the fourth applicator is defined to apply the non-Newtonian fluid in a region between the first portion and the second portion of the surface of the substrate when present. 
     
     
         10 . The apparatus of  claim 8 , wherein the fifth applicator covering a trailing edge of the proximity head and designed to apply the non-Newtonian fluid in a region between the second portion and a trailing edge of the surface of the substrate when present. 
     
     
         11 . The apparatus of  claim 5 , further includes one or more controls to control the application and flow of the non-Newtonian fluid, the first chemistry and the second chemistry to the surface of the substrate when present, the controls communicatively coupled to a computer for automatic monitoring and adjusting of the flow of the non-Newtonian fluid, the first chemistry and the second chemistry. 
     
     
         12 . An apparatus for preparing a surface of a substrate using a proximity head, comprising:
 a substrate supporting device to receive and hold the substrate along a plane;   a proximity head including a head surface having a plurality of outlets, the proximity head includes,
 a first set of outlet ports defining a non-Newtonian fluid applicator configured to apply a non-Newtonian fluid between the surface of the substrate and a head surface of the proximity head, the non-Newtonian fluid defining containment wall along one or more sides between the head surface and the surface of the substrate, the one or more sides provided with the non-Newtonian fluid defining a treatment region on the substrate between the head surface and the surface of the substrate; 
 a second set of outlet ports defining a Newtonian fluid applicator to apply a Newtonian fluid to the surface of the substrate, such that the applied Newtonian fluid is substantially contained in the treatment region due to the defined containment wall, the Newtonian fluid aiding in the removal of one or more contaminants from the surface of the substrate; and 
 a third set of outlet ports to remove the Newtonian fluid applied to the surface of the substrate, 
 wherein the Newtonian fluid is immiscible in the non-Newtonian fluid. 
   
     
     
         13 . The apparatus for preparing a substrate using a proximity head as recited in  claim 12 , wherein the substrate supporting device is a carrier device that moves the substrate along a plane. 
     
     
         14 . The apparatus for preparing a substrate using a proximity head as recited in  claim 13 , wherein the movement of the substrate on the carrier device along the plane is counter-balanced by a flow of the non-Newtonian fluid through the non-Newtonian fluid applicator so that the Newtonian fluid within the treatment region is substantially maintained. 
     
     
         15 . The apparatus for preparing a substrate using a proximity head as recited in  claim 12 , wherein the substrate supporting device with the substrate is configured to rotate relative to the proximity head such that the surface of the substrate is substantially exposed to the Newtonian fluid contained within the treatment region. 
     
     
         16 . The apparatus for preparing a substrate using a proximity head as recited in  claim 12 , wherein the proximity head further includes a fourth set of outlet ports defining a second Newtonian fluid applicator configured to apply a second Newtonian fluid to the surface of the substrate, such that the second Newtonian fluid is substantially contained within the treatment region defined between the head surface and the surface of the substrate, the second Newtonian fluid contained in a region within the treatment region distinct from a region where the Newtonian fluid is applied, the first set of outlet ports of the non-Newtonian fluid applicator configured to substantially separate the Newtonian fluid from the second Newtonian fluid within the treatment region,
 wherein the third set of outlet ports is further configured to remove the second Newtonian fluid from the surface of the substrate, the second Newtonian fluid is different from the Newtonian fluid.   
     
     
         17 . The apparatus of  claim 12 , wherein the proximity head further includes a gas applicator to apply an inert gas to the surface of the substrate, such that the inert gas is substantially contained within the treatment region defined by the containment wall providing a substantially oxygen-free environment in the treatment region.