High performance coupled coplanar waveguides with slow-wave features

Abstract

A device including a coplanar waveguide structure is disclosed. A coplanar waveguide structure comprises one or more ground lines proximate to one or more signal lines, the signal lines and the ground lines being essentially parallel to each other and oriented substantially along a first direction; a periodic structure included in at least one of the one or more signal lines comprises alternating segments, wherein at least one of the alternating segments extends in a second direction transverse to the first direction.

1 . A coplanar waveguide structure comprising:
 one or more ground lines proximate to one or more signal lines, the signal lines and the ground lines being essentially parallel to each other and oriented substantially along a first direction;   a periodic structure included in at least one of the one or more signal lines comprises alternating segments, wherein at least one of the alternating segments extends in a second direction transverse to the first direction.   
   
   
       2 . The coplanar waveguide structure of  claim 1  wherein at least one of the one or more ground lines includes a periodic structure comprising alternating segments, wherein at least one of the alternating segments extends in a second direction transverse to the first direction. 
   
   
       3 . The coplanar waveguide structure of  claim 1  wherein the alternating segments comprise a first segment and a second segment alternating periodically, the second segment being wider than the second segment. 
   
   
       4 . The coplanar waveguide structure of  claim 3  wherein the second segment comprises an extension that includes a rectangular shape, a circular shape, a triangular shape, or any other suitable shape. 
   
   
       5 . The coplanar waveguide structure of  claim 4  wherein the extension extends outwardly or inwardly. 
   
   
       6 . The coplanar waveguide structure of  claim 1  wherein a transverse cross-section of the at least one signal line including the periodic structure varies periodically over its length. 
   
   
       7 . The coplanar waveguide structure of  claim 1  further comprising one or more islands proximate to the one or more signal lines and the one or more ground lines. 
   
   
       8 . The coplanar waveguide structure of  claim 7  wherein the one or more islands comprises a conductive material. 
   
   
       9 . The coplanar waveguide structure of  claim 1  further comprising one or more floating strips oriented above and/or below the one or more signal lines and the one or more ground lines. 
   
   
       10 . The coplanar waveguide structure of  claim 1  wherein the one or more floating strips are oriented transversely to the one or more signal lines and the one or more ground lines. 
   
   
       11 . The coplanar waveguide structure of  claim 1  further comprising one or more islands proximate to and one or more floating strips oriented above and/or below the one or more signal lines and the one or more ground lines. 
   
   
       12 . A device comprising:
 a substrate;   an insulator over the semiconductor substrate;   a coplanar waveguide structure over the insulator and oriented substantially along a first direction; and   one or more slot-type floating strips oriented above and/or below the coplanar waveguide structure in a second direction transverse to the first direction, wherein the one or more slot-type floating strips are located periodically along the first direction.   
   
   
       13 . The device of  claim 12  wherein at least one of the one or more slot-type floating strips includes one or more extensions. 
   
   
       14 . The device of  claim 12  wherein the one or more slot-type floating strips comprise a conductive material. 
   
   
       15 . The device of  claim 12  wherein the coplanar waveguide structure comprises one or more conductor lines, wherein at least one of the one or more conductor lines comprises a periodic structure. 
   
   
       16 . The device of  claim 12  further comprising one or more slot-type grounded floating extensions coupled to at least one of the one or more slot-type floating strips, the one or more slot-type grounded floating extensions being oriented in the first direction. 
   
   
       17 . The device of  claim 16  wherein the one or more slot-type floating strips are oriented periodically. 
   
   
       18 . A device comprising:
 a substrate;   an insulator over the semiconductor substrate;   a coplanar waveguide structure over the insulator and oriented substantially along a first direction;   one or more slot-type floating strips oriented above and/or below the coplanar waveguide structure in a second direction transverse to the first direction, wherein the one or more slot-type floating strips are located periodically along the first direction; and   one or more slot-type grounding strips oriented above and/or below the coplanar waveguide structure in the first direction, wherein the one or more slot-type grounding strips are coupled to at least one of the one or more slot-type floating strips.   
   
   
       19 . The device of  claim 18  wherein at least one of the one or more slot-type grounding strips includes one or more extensions. 
   
   
       20 . The device of  claim 18  wherein the one or more slot-type grounding strips are located periodically along the second direction.