Mask carrier treatment to prevent haze and ESD damage

Abstract

A reticle carrier including a base portion and a cover portion at least partially detachable from the base portion. The base portion and the cover portion are configured to collectively house a reticle in a region collectively defined by the base portion and the cover portion when the base portion and the cover portion are fully attached. At least a portion of an interior surface of at least one of the base portion and the cover portion is treated with a sulfide-absorbing composition, such as silver or a silver-containing alloy.

1 . A reticle carrier, comprising:
 a base portion; and   a cover portion at least partially detachable from the base portion, wherein:   the base portion and the cover portion are configured to collectively house a reticle in a region collectively defined by the base portion and the cover portion when the base portion and the cover portion are fully attached, and   at least a portion of an interior surface of at least one of the base portion and the cover portion is treated with a sulfide-absorbing composition.   
   
   
       2 . The reticle carrier of  claim 1  wherein the sulfide-absorbing composition at least partially comprises silver. 
   
   
       3 . The reticle carrier of  claim 1  wherein the at least a portion of an interior surface of each of the base portion and the cover portion is treated with the sulfide-absorbing composition. 
   
   
       4 . The reticle carrier of  claim 1  wherein the sulfide-absorbing composition is coated on the treated portion of the interior surface. 
   
   
       5 . The reticle carrier of  claim 1  wherein the sulfide-absorbing composition is implanted into the treated portion of the interior surface. 
   
   
       6 . The reticle carrier of  claim 1  wherein surfaces defining the region configured to house the reticle are substantially treated with the sulfide-absorbing composition. 
   
   
       7 . The reticle carrier of  claim 1  wherein at least a portion of an exterior surface of at least one of the base portion and the cover portion is treated with the sulfide-absorbing composition. 
   
   
       8 . The reticle carrier of  claim 1  wherein a substantial portion of the exterior of the base portion and the cover portion are substantially treated with the sulfide-absorbing composition. 
   
   
       9 . The reticle carrier of  claim 1  wherein at least a portion of at least one of the base portion and the cover portion substantially comprises an electrostatic dissipative composition. 
   
   
       10 . A method, comprising:
 positioning a reticle in a reticle carrier, the reticle carrier having an interior space configured to receive and contain the reticle; and   treating at least a portion of one of the reticle and an internal surface of the interior space with a sulfide-absorbing composition.   
   
   
       11 . The method of  claim 10  wherein the sulfide-absorbing composition at least partially comprises silver. 
   
   
       12 . The method of  claim 10  wherein treating at least a portion of one of the reticle and the internal surface of the interior space includes coating at least a portion of one of the reticle and the internal surface of the interior space with the sulfide-absorbing composition. 
   
   
       13 . The method of  claim 10  wherein treating at least a portion of one of the reticle and the internal surface of the interior space includes implanting at least a portion of one of the reticle and the internal surface of the interior space with the sulfide-absorbing composition. 
   
   
       14 . The method of  claim 10  wherein treating at least a portion of one of the reticle and the internal surface of the interior space includes treating a substantial portion of a surface of the reticle with the sulfide-absorbing composition. 
   
   
       15 . The method of  claim 10  wherein treating at least a portion of one of the reticle and the internal surface of the interior space includes treating a substantial portion of a surface of a pellicle coupled to the reticle with the sulfide-absorbing composition. 
   
   
       16 . The method of  claim 10  wherein treating at least a portion of one of the reticle and the internal surface of the interior space includes treating a substantial portion of the internal surface of the interior space with the sulfide-absorbing composition. 
   
   
       17 . An apparatus, comprising:
 a reticle carrier having an internal region configured to house at least one reticle, wherein the reticle carrier at least partially comprises an electrostatic dissipative composition; and   a sulfide-absorbing member located at least partially within the internal region of the reticle carrier.   
   
   
       18 . The apparatus of  claim 17  wherein the sulfide-absorbing member is a metallic member having the electrostatic dissipative composition, is integral to the reticle carrier, and at least partially defines the internal region of the reticle carrier. 
   
   
       19 . The apparatus of  claim 17  wherein the sulfide-absorbing member comprises a non-sulfide-absorbing structure, wherein at least a portion of a surface of the non-sulfide-absorbing structure is coated with a sulfide-absorbing composition. 
   
   
       20 . The apparatus of  claim 17  wherein the sulfide-absorbing member comprises a non-sulfide-absorbing structure, wherein at least a portion of a surface of the non-sulfide-absorbing structure is implanted with a sulfide-absorbing composition.